a foup opener
An opener and horizontal plate technology, applied in the direction of opening closed containers, bottles/container caps, packaging, etc., can solve the problems of small openers, inconvenient use, FOUP can not be opened and closed, etc., to achieve convenient operation and use. Effect
Active Publication Date: 2021-01-01
合肥新汇成微电子股份有限公司
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Problems solved by technology
[0005] The purpose of the present invention is to solve the need for an opener to open and close the FOUP in the prior art when it is in use. Since the opener is relatively small, it cannot be used conveniently during use, and it is easy to cause loss, so that the FOUP Unable to open and close the problem, and proposed a FOUP opener
Method used
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[0019] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention.
[0020] In describing the present invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", " The orientation or positional relationship indicated by "outside", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, so as to Specific orientation configurations and operations, therefore, are not to be construed as limitations on the invention.
[0021] refer to Figure ...
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The invention discloses a FOUP open tool which comprises a transverse plate. Two placing slots are formed in the side wall of the transverse plate, a grip is placed in each placing slot, each grip stretches to the outer side of the transverse plate, a groove is formed in each grip, a key is rotatably connected in each groove, a control slot is also formed in each grip, a control device is arrangedin each control slot, the control devices are matched with corresponding keys, two wire slots are symmetrically formed in the transverse plate, a connecting block is fixedly connected to the side wall of the each grip, and the two connecting blocks are arranged oppositely, a winding device is arranged in each wire slot, and each winding device is connected to each connecting block through a connecting wire. The FOUP open tool disclosed by the invention has the advantages that the keys for opening a FOUP are connected together and are not easily separated to lose. During use, an operator can operate and use the keys more conveniently.
Description
technical field [0001] The invention relates to the technical field of wafer processing in the semiconductor industry, in particular to a FOUP opener. Background technique [0002] Front-opening wafer transfer box FOUP. This is a container used to protect, transport, and store wafers in semiconductor manufacturing processes. It can accommodate 25 300mm wafers inside, and its main component is a front opening that can accommodate 25 wafers. The container also has a front-opening door frame for the opening and closing of the container. It is an important loading container for the automatic transfer system in the 12-inch (300mm) fab. [0003] When FOUP is in use, it needs an opener to open and close it. Since the opener is relatively small, it cannot be used conveniently during use, and it is easy to cause loss, so that FOUP cannot be opened and closed. [0004] To this end, we propose a FOUP opener. Utility model content [0005] The purpose of the present invention is to...
Claims
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IPC IPC(8): B67B7/00
Inventor 吴芳
Owner 合肥新汇成微电子股份有限公司