A Measuring Method for Large Gradient Freeform Surface
A measurement method and free technology, applied in measurement devices, instruments, optical devices, etc., can solve problems such as inability to resolve, dense fringes in the hologram area, etc.
Active Publication Date: 2021-09-21
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology
Whether it is the most widely used interferometry or digital holography, it is necessary to analyze the fringe pattern to realize the recovery of three-dimensional information. In the face of a free-form surface with a large gradient, the existing methods still encounter too dense fringes in the hologram area. unresolvable problem
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[0024] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0025] Such as figure 1 As shown, in the large-gradient free-form surface measurement system of the present invention, the diffracted object light of the free-form surface 2 to be measured fixed on the electronically controlled rotary table 1 passes through the microscope objective lens 3, forms a hologram with the reference light 5 and is captured by the image sensor 4, and then Continuously provide multiple rotation angles for the free-form surface 2 to be measured through the electronically controlled rotating table 1, and record multiple frames of holograms of the free-form surface modulated by the tilt factor. Then, through the image processing algorithm, the selection of the sparse sub-region of the hologram stripes in each frame is completed, and then the three-dimensional structure of the sub-region of the modulated free-form surface ...
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The invention discloses a large-gradient free-form surface measurement method. A certain angle is applied to the free-form surface to be measured to complete the spatial frequency modulation of the light wave of the free-form surface to be measured, which is collected by an image sensor. By adjusting multiple angles and recording multiple frames of holograms of different angles of the free-form surface, and then through the image processing algorithm, the selection of the sparse sub-region of the hologram stripes in each frame is completed, and then the modulated free-form surface to be measured is restored by the digital reconstruction algorithm. The three-dimensional structure of the subregion. Finally, according to the demodulation algorithm, the three-dimensional structure of the original free-form surface to be measured can be restored, and the three-dimensional surface information of the free-form surface can be recovered by using a suitable splicing algorithm to realize the wavefront data fitting of the multi-frame sub-region. The invention realizes the collection process of the high-frequency information of the free-form surface through the introduction of the inclination angle, and provides a new solution for the measurement of the free-form surface.
Description
technical field [0001] The invention relates to the field of free-form surface measurement, in particular to a large-gradient free-form surface measurement method. Background technique [0002] With the development of modern processing technology, free-form surface components have been widely used in important fields such as aerospace, biomedicine, national defense and military industry, and modern optics in recent years. Free-form surfaces mainly include rotationally symmetric aspheric surfaces and non-rotationally symmetric aspheric surfaces, which have a higher degree of freedom in structure than common spherical elements, and can be more flexibly adapted to the needs of use. Especially in the field of optics, the optical system composed of free-form surface lenses can simplify the layout, improve energy transmission efficiency, and better correct aberrations compared with traditional optical systems. Nowadays, the complexity and precision of free-form surfaces require s...
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IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 金川何渝唐燕冯金花胡松赵立新
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI