Unlock instant, AI-driven research and patent intelligence for your innovation.

Manufacturing method of metal line, manufacturing method of display panel and display panel

A manufacturing method and display panel technology, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve problems such as metal discoloration, and achieve the effect of avoiding metal discoloration

Inactive Publication Date: 2019-07-23
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
View PDF3 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The embodiment of the present application provides a method for manufacturing a metal wire, a display panel, and a display panel, which can solve the problem of metal discoloration during the etching process

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Manufacturing method of metal line, manufacturing method of display panel and display panel
  • Manufacturing method of metal line, manufacturing method of display panel and display panel
  • Manufacturing method of metal line, manufacturing method of display panel and display panel

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0031] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Apparently, the described embodiments are only some of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without making creative efforts belong to the scope of protection of this application.

[0032] It should be noted that the manufacturing method of the metal line provided in the embodiment of the present application is a part of the manufacturing process of the display panel. Regarding the manufacturing method of other parts of the display panel, such as the manufacturing method of the common click, pixel electrode, gate line and other structures, It is not the focus of this application, so it will not be introduced in detail here.

[0033] Wherein, the display pan...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The embodiment of the present invention discloses a manufacturing method of a metal line, a manufacturing method of a display panel and a display panel. The manufacturing method of the metal line comprises the steps: performing primary illumination processing on a preset metal layer; developing the preset metal layer subjected to primary illumination processing; performing secondary illumination processing on the developed preset metal layer to remove impurities on the surface of the preset metal layer; and etching the preset metal layer subjected to secondary illumination processing to form the metal line. The present scheme can prevent impurities from chemically reacting with metals under the action of plasma to form compounds that cause metal discoloration.

Description

technical field [0001] The present application relates to the field of display technology, in particular to a metal wire, a method for manufacturing a display panel, and a display panel. Background technique [0002] In the current dry etching technology, there is one thing in common, that is, the metal wires will be exposed to the plasma environment, resulting in the organic substances remaining on the surface of the metal wires chemically reacting with the metal under the action of the plasma to form a compound substance, which will cause the metal to change color. And then affect the performance of the product. Contents of the invention [0003] Embodiments of the present application provide a metal wire, a method for manufacturing a display panel, and a display panel, which can solve the problem of metal discoloration during the etching process. [0004] An embodiment of the present application provides a method for manufacturing a metal wire, including: [0005] Per...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): H01L21/768
CPCH01L21/7684H01L21/76853
Inventor 袁文豪张忠华
Owner SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD