Dual resonant mode coupled micro-mechanical piezoelectric ultrasonic transducer

A mode coupling, micro-mechanical technology, applied in the direction of the fluid using vibration, can solve the problem of low bandwidth and sensitivity

Pending Publication Date: 2019-07-26
ZHEJIANG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to solve the problem of low bandwidth and sensitivity in the pri

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  • Dual resonant mode coupled micro-mechanical piezoelectric ultrasonic transducer
  • Dual resonant mode coupled micro-mechanical piezoelectric ultrasonic transducer
  • Dual resonant mode coupled micro-mechanical piezoelectric ultrasonic transducer

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Embodiment Construction

[0025] The present invention will be further elaborated and illustrated below in conjunction with the accompanying drawings and specific embodiments. The technical features of the various implementations in the present invention can be combined accordingly on the premise that there is no conflict with each other.

[0026] Such as Figure 1~4 As shown, the micromechanical piezoelectric ultrasonic transducer coupled with double resonant modes mainly includes a substrate 4 , a bottom electrode 3 , a piezoelectric layer 2 and an upper electrode 1 . By selectively etching a groove-shaped cavity on the back of the circular substrate 4, a circular elastic structure layer 41 with a certain thickness is formed on the front of the substrate 4, and the unetched part of the substrate 4 around the elastic structure layer 41 forms a fixed end. . The bottom electrode 3 , the piezoelectric layer 2 and the upper electrode 1 are sequentially stacked on the front of the elastic structural laye...

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Abstract

The invention discloses a dual resonant mode coupled micro-mechanical piezoelectric ultrasonic transducer. The transducer is provided with a substrate, a structure layer, a bottom electrode, a piezoelectric layer and an upper electrode. The working principle of the transducer is to realize the conversion of mechanical energy to electrical energy or electrical energy to mechanical energy through using positive and negative piezoelectric effects. According to the micro-mechanical piezoelectric ultrasonic transducer, two parts with opposite stress symbols of the diaphragm are divided into an inner region and an outer region on the structural layer, wherein the inner region adopts a boundary fixed supported film vibration mode, and the outer region adopts a single-end fixed supported cantilever beam vibration mode. The resonance frequency of the external cantilever beam is adjusted through changing the geometrical size of the external cantilever beam, so that the transducer is selectivelyrealized that (1) when the resonance frequency of the inner membrane and the resonance frequency of the external beam are the same, the emission sensitivity of the transducer can be improved; (2) whenthe resonance frequency difference between the inner membrane and the external beam is within the -3dB, the bandwidth of the transducer can be increased; and (3) when the resonance frequency difference between the inner membrane and the external beam is large, double-resonance frequency vibration can be realized.

Description

technical field [0001] The invention belongs to the field of transducers in the technical field of micro-electromechanical systems (MEMS), in particular to a piezoelectric ultrasonic transducer with large bandwidth, high emission sensitivity and dual-frequency excitation modes. Background technique [0002] Piezoelectric ultrasonic transducer is a device that can convert electrical energy into mechanical energy, and convert mechanical energy into electrical energy, which integrates sending and receiving ultrasonic waves. Traditional ultrasonic transducers are machined, which is bulky, high power consumption, and unfavorable for integration, and because their acoustic impedance does not match common acoustic transmission media (air, water), their acoustic emission efficiency is low. The micro-mechanical piezoelectric ultrasonic transducer processed by the micro-manufacturing process combined with the micro-electro-mechanical system technology effectively overcomes the above-m...

Claims

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Application Information

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IPC IPC(8): B06B1/06
CPCB06B1/06Y02D30/70
Inventor 谢金陈旭颖杨邓飞
Owner ZHEJIANG UNIV
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