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A line width measurement method and line width measurement system

A measurement method and line width technology, applied in the field of line width measurement method and line width measurement system, can solve problems affecting property insurance judgment, abnormal product quality, large machine difference, etc., to ensure property insurance judgment, improve quality, and eliminate influences Effect

Active Publication Date: 2021-03-23
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The embodiment of the present application provides a line width measurement method and a line width measurement system to solve the large machine difference caused by the line width measurement machine measuring the line width of products of different process types under the same measurement condition, which affects the judgment of property insurance and the Problems causing abnormal product quality

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  • A line width measurement method and line width measurement system
  • A line width measurement method and line width measurement system
  • A line width measurement method and line width measurement system

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Embodiment Construction

[0046] Specific structural and functional details disclosed herein are representative only and are for purposes of describing example embodiments of the present application. This application may, however, be embodied in many alternative forms and should not be construed as limited to only the embodiments set forth herein.

[0047] In the description of this application, it should be understood that the terms "central", "lateral", "upper", "lower", "left", "right", "vertical", "horizontal", "top", The orientation or positional relationship indicated by "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the application and simplifying the description, rather than indicating or implying the referred device Or elements must have a certain orientation, be constructed and operate in a certain orientation, and thus should not be construed as limiting the application. In addition...

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Abstract

The invention discloses a line width measuring method and a line width measuring system, wherein the line width measuring method comprises the following steps: acquiring the process type of a productto be detected; performing machine difference adjustment on the line width measuring machine according to the process type of the product to be detected; and measuring the line width of the product tobe detected by adopting the line width measuring machine after the machine difference adjustment. The line width measuring machine carries out corresponding machine difference adjustment before carrying out line width measuring on products to be detected of different process types, eliminates the influence of the machine difference on a measuring result in time, ensures the production risk judgment of the products to be detected of different process types, and improves the quality of the products to be detected of different process types.

Description

technical field [0001] The present application relates to the technical field of line width measuring machines, in particular to a line width measurement method and a line width measurement system. Background technique [0002] In the display panel production process, inspection is an indispensable procedure, which is related to the quality of the final product, among which the measurement of critical dimension (CD) is more important. The output of display panels is too large, a single line width measuring machine cannot meet the demand, and two or more machines inevitably have machine differences. [0003] Generally, in the line width measurement process, the same line width measuring machine includes multiple different measurement processes, and the same measurement process corresponds to a variety of products of different process types. For products of different process types, the measurement method established by the same measurement process All are parameters measured ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B21/02
CPCG01B21/02
Inventor 曾赞廷褚忠涛
Owner TCL CHINA STAR OPTOELECTRONICS TECH CO LTD