Valveless piezoelectric gas pump based on synthetic jet principle

Abstract

The invention discloses a valveless piezoelectric gas pump based on the synthetic jet principle. The valveless piezoelectric gas pump comprises a top plate, a mounting plate, a bottom plate, an upperpiezoelectric vibrator and a lower piezoelectric vibrator, wherein the mounting plate is assembled between the top plate and the bottom plate, a plurality of turbine blocks are evenly distributed on the circumferential ring of the mounting plate, a gas flow channel is formed between every two adjacent turbine blocks, the mounting plate is hollow, the top plate is fixed to the tops of the turbine blocks, and a gas outlet hole is formed in the position, corresponding to the hollow part of the mounting plate, of the top plate; and a groove is formed in the middle of the bottom plate, the upper piezoelectric vibrator and the lower piezoelectric vibrator are embedded in the groove, a pump cavity is formed between the upper piezoelectric vibrator and the lower piezoelectric vibrator, and a ventilation opening is formed in the part, corresponding to the gas outlet hole of the top plate, of the upper piezoelectric vibrator. The valveless piezoelectric gas pump has the beneficial effects that the gas pumping efficiency is high through the structural characteristics of the valveless piezoelectric gas pump, the required functions are met under the situation of saving the size, and the low-noise requirements are met.

Description

technical field [0001] The invention relates to a valveless piezoelectric electric pump, in particular to a valveless piezoelectric electric pump based on the principle of synthetic jet. Background technique [0002] At present, compared with traditional pumps, piezoelectric pumps have the advantages of miniaturization, miniaturization, light weight, high precision, simple structure, low energy consumption, and low noise. With the rapid development of microelectronic devices and the continuous upgrading of chips, problems such as cooling and heat dissipation, ventilation and sensing need to be solved urgently, and the implantation of piezoelectric pumps can effectively deal with these problems. [0003] The piezoelectric pump is a driving device that deforms the piezoelectric vibrator through the inverse piezoelectric effect, thereby alternately increasing / decreasing the volume of the pump chamber, and then changing the pressure in the pump chamber to realize the delivery of...

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Problems solved by technology

[0005] The purpose of the present invention is to provide a valveless piezoelectric electric pump based on the principle of synthetic jets in order to solve the problems of low efficiency, small pumping volume, low functional volume ratio and high noise of the existing piezoelectric pump fluid.

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