Temperature adjusting inertial sensor
An inertial sensor and temperature sensor technology, applied in the field of sensors, can solve the problems of high power, low precision, and large overall size, and achieve the effects of low cost, low power, and small device size
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Embodiment 1
[0020] The invention provides a temperature-adjusting inertial sensor, which is characterized in that: the temperature-adjusting inertial sensor includes an integrated circuit module 1, a temperature sensor 2, a serial interface module 3, a temperature control loop 4, a heating system 5, a digital or Analog circuit module 6, MEMS module 7, expandable part module 8, heating resistor 9, power device 10, transistor drive device 11, pulse width adjustment 12, target temperature setting module 13, adding vibration prevention circuit into limit cycle module 14, Accelerator gyroscope output terminal 15;
[0021] Wherein: a temperature sensor 2, a serial interface module 3, a temperature control circuit 4, a heating system 5, and a digital or analog circuit module 6 are arranged on the integrated circuit module 1;
[0022] The MEMS module 7 is connected to the integrated circuit module 1, and the temperature control loop 4 and the heating system 5 have an expandable part module 8; the...
Embodiment 2
[0029] The invention provides a temperature-adjusting inertial sensor, which is characterized in that: the temperature-adjusting inertial sensor includes an integrated circuit module 1, a temperature sensor 2, a serial interface module 3, a temperature control loop 4, a heating system 5, a digital or Analog circuit module 6, MEMS module 7, expandable part module 8, heating resistor 9, power device 10, transistor drive device 11, pulse width adjustment 12, target temperature setting module 13, adding vibration prevention circuit into limit cycle module 14, Accelerator gyroscope output terminal 15;
[0030] Wherein: a temperature sensor 2, a serial interface module 3, a temperature control circuit 4, a heating system 5, and a digital or analog circuit module 6 are arranged on the integrated circuit module 1;
[0031] The MEMS module 7 is connected to the integrated circuit module 1, and the temperature control loop 4 and the heating system 5 have an expandable part module 8; the...
Embodiment 3
[0036] The invention provides a temperature-adjusting inertial sensor, which is characterized in that: the temperature-adjusting inertial sensor includes an integrated circuit module 1, a temperature sensor 2, a serial interface module 3, a temperature control loop 4, a heating system 5, a digital or Analog circuit module 6, MEMS module 7, expandable part module 8, heating resistor 9, power device 10, transistor drive device 11, pulse width adjustment 12, target temperature setting module 13, adding vibration prevention circuit into limit cycle module 14, Accelerator gyroscope output terminal 15;
[0037] Wherein: a temperature sensor 2, a serial interface module 3, a temperature control circuit 4, a heating system 5, and a digital or analog circuit module 6 are arranged on the integrated circuit module 1;
[0038] The MEMS module 7 is connected to the integrated circuit module 1, and the temperature control loop 4 and the heating system 5 have an expandable part module 8; the...
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