Revolution-rotation coating equipment for vacuum coating

A technology of vacuum coating and coating equipment, applied in vacuum evaporation coating, sputtering coating, ion implantation coating and other directions, can solve the problems of inability to coat, increase the cost of equipment purchase, and it is difficult to ensure the consistency of both sides, so as to improve the efficiency , save time and power, ensure uniform and consistent results

Pending Publication Date: 2019-08-27
佛山王氏航空光学科技有限公司
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  • Abstract
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  • Application Information

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Problems solved by technology

[0004] However, the existing revolution and rotation turrets are constantly rotating in both revolution and rotation during the coating process, which cannot selectively and uniformly coat films, and only revolution turrets cannot realize automatic tur

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  • Revolution-rotation coating equipment for vacuum coating
  • Revolution-rotation coating equipment for vacuum coating
  • Revolution-rotation coating equipment for vacuum coating

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[0025] The following describes the technical solutions in the embodiments of the present invention clearly and completely with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.

[0026] The embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings, and the details are as follows:

[0027] A revolution coating equipment for vacuum coating includes a furnace body 1 in which a coating furnace chamber 18 is provided. The coating furnace chamber 18 is provided with a revolution disk rotation mechanism 21 and a rotation gear mechanism 22, and an inner wall ...

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Abstract

The invention relates to revolution-rotation coating equipment for vacuum coating. A coating furnace chamber is arranged in a furnace body; a revolution plate rotating mechanism and a rotation gear mechanism are arranged in the coating furnace chamber; and a target material is connected to one side of the inner wall. According to the revolution-rotation coating equipment for vacuum coating provided by the invention, the revolution plate rotating mechanism adopts a planetary gear mechanism to drive a hanging frame tray so as to realize the revolution of an AR fixed frame assembly, and the rotation gear mechanism enables a rack and a rotation gear to mesh through a crank and rocker mechanism, so that a rotation lower shaft rotates to drive a hanging tool to turn over at 180 degrees and coaton the reverse side, and the aim of accurately turning over the hanging tool is achieved through a rotation positioner; and since the crank and rocker mechanism is controlled through a rotary cylinder, uniform coating can be selectively carried out, automatic turnover can be realized within one same furnace batch, the consumption of time and electric energy required for opening, turning over, vacuumizing and heating is avoided, the time and the electric energy are effectively saved, the double-faced coating efficiency is improved, and the uniformity and the consistency of double-faced coatingare effectively ensured.

Description

technical field [0001] The invention relates to the field of coating equipment, and more specifically, to a male-rotating coating equipment for vacuum coating. Background technique [0002] The turntable of the traditional coating machine is a simple revolution, as long as the transmission device of the turntable is started, the turntable will rotate continuously inside the coating machine, and the self-rotating reverse coating cannot be performed. [0003] When the product needs to be coated on both sides, after one side is coated, it needs to stop and open the door, turn over and close the door again to vacuumize and heat up before starting the coating. However, opening the door and turning over and then vacuumizing and heating up will consume time and power. In order to save time and power, through improvement, it can It can turn over automatically without opening the door, thus saving the time and electric energy for opening the door to vacuumize and heat up. [0004] H...

Claims

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Application Information

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IPC IPC(8): C23C14/50C23C16/458
CPCC23C14/505C23C16/4581
Inventor 王越民王焘骏
Owner 佛山王氏航空光学科技有限公司
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