A processing method of microstructure array based on online measurement

Abstract

The invention discloses a machining method of a microstructure array based on on-line measurement. The method comprises the following steps of (1), fixing a workpiece and a positioning block on a B-axis lifting platform of a four-axis machine tool; (2), machining the top surface of the workpiece and the top surface of the positioning block into planes by using a first cutter; (3), performing micro-structure array machining, and controlling the remaining machining amount within 50 microns; (4), taking down the positioning block, measuring the width d of a groove in the positioning block, calculating the depth h1 of the groove, and calculating the remaining machining depth h2 equal to H minus h1; and (5), finishing machining of the residual machining depth h2 by means of a nano positioning table. According to the machining method of the microstructure array based on on-line measurement, high-quality machining of the microstructure array with large depth and large area on the four-axis machine tool can be realized, accurate tool setting links after tool changing is carried out are reduced, and machining efficiency is improved.

Description

technical field [0001] The invention relates to the technical field of microstructure arrays, in particular to a processing method for microstructure arrays based on on-line measurement. Background technique [0002] The processing of large-depth and large-area microstructure arrays needs to ensure the processing accuracy in two directions perpendicular to the workpiece surface and parallel to the workpiece surface, and it is difficult to achieve good control. The existing processing methods mainly include: [0003] (1) Use a five-axis machine tool for processing, because the five-axis machine tool includes X-axis, Y-axis, Z-axis, C-axis and B-axis, which can realize control in various directions, and the workpiece can be placed on the B-axis table , use the Z-axis to control the spacing of the array structure, and use the Y-axis to control the shape and depth of the microstructure; but the use of five-axis processing machine tools is expensive and cannot be widely used in ...

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Problems solved by technology

[0003] (1) Use a five-axis machine tool for processing, because the five-axis machine tool includes X-axis, Y-axis, Z-axis, C-axis and B-axis, which can realize control in various directions, and the workpiece can be placed on the B-axis table , use the Z-axis to control the spacing of the array structure, and use the Y-axis to control the shape and depth of the microstructure; but the use of five-axis processing machine tools is expensive and cannot be widely used in various places. The post-error cannot be eliminated, and high-precision machining in the depth direction cannot be realized

[0004] (2) Using a four-axis machine tool with a manual lifting table for processing, this processing is divided into two methods: 1) Place the workpiece on the C-axis vacuum chuck, use the lifting table to control the array spacing, and use the Z-axis to control the processing depth , due to the uncontrollable accuracy of the manual lifting table, the spacing accuracy of the array structure is uncontrollable, and there are problems in processing; The lifting table controls the processing depth, the height is uncontrollable, and the processing error is large

[0005] Existing processing methods cannot achieve high-quality processing of large-depth, large-area microstructure arrays

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