Piezoelectric ceramic control device for interferometer and control method thereof

Abstract

The invention discloses a piezoelectric ceramic control device for an interferometer and a control method of the control device. Telescoping of a deflection motor in the XY direction drives a piezoelectric ceramic pedestal to make circumferential deflection with limited amplitude by taking the first fixed axis as the center in the XY plane, telescoping of the deflection motor in the XZ direction drives the a deflection pedestal in the XY direction to make circumferential deflection with limited amplitude by taking the second fixed axis as the center in the XZ plane, so that the angle deflection in pitching and horizontal deflection attitudes of the piezoelectric ceramics for the interferometer can be adjusted accurately electrically, the deflection adjustment precision is high, the deflection angle can reach + / -4 degree, and the total structure is compact and convenient to integrate. Attitude adjustment of interference fringes is realized by deflection of a reference mirror, the piezoelectric ceramics are fixed to the reference mirror, and thus, the piezoelectric ceramic control device for the interferometer can accurately electrically adjust the amplitude and deflection angle of the interference fringes.

Description

technical field [0001] The invention relates to the technical field of precision control, in particular to a piezoelectric ceramic control device for an interferometer and a control method thereof. Background technique [0002] White light interferometer (optical profiler) has become one of the more and more popular ultra-precision detection methods due to its advantages of high precision, large range, and no damage. [0003] The white light interferometer detects the three-dimensional shape by calculating through a series of grayscale images. Equally spaced grayscale images are the basis for white light interferometers to achieve coherent measurement, and the equal distance needs to be completed by piezoelectric ceramics. Piezoelectric ceramics output displacements at equal intervals to change the interference phase at equal intervals to realize image scanning acquisition. Therefore, the displacements output by piezoelectric ceramics need to meet the requirements of high p...

AI Technical Summary

Problems solved by technology

[0006] In view of this, the present invention provides a piezoelectric ceramic control device for an interferometer and its control method, which are used to solve the problems of low precision and large volume in the existing piezoelectric ceramic attitude adjustment device for an interferometer.

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