A transfer carrier, its manufacturing method and transfer method of light-emitting diode chips
A technology of light-emitting diodes and transfer methods, which is applied in semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc., can solve the problems of high transfer process cost, low efficiency, and difficulty in large-scale size, and achieve high transfer efficiency and material cost. Low, easy to upsize effect
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[0044] Aiming at the problems of high cost, low efficiency, and difficulty in large-scale transfer process of LED chips existing in the prior art, embodiments of the present invention provide a transfer carrier, a manufacturing method thereof, and a transfer method of LED chips.
[0045] The specific implementation of the transfer carrier provided by the embodiments of the present invention, its manufacturing method and the transfer method of the light emitting diode chip will be described in detail below with reference to the accompanying drawings. The thickness and shape of each film layer in the drawings do not reflect the real scale, and the purpose is only to illustrate the content of the present invention.
[0046] In the first aspect, the embodiment of the present invention provides a transfer carrier, such as figure 1 As shown, the transfer carrier 11 includes:
[0047] The base 111 has a plurality of through holes U through the thickness of the base 111; the base 111...
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