Three-stage micro-displacement amplification mechanism and amplifying method thereof

Abstract

The invention discloses a three-stage micro-displacement amplification mechanism, which comprises two asymmetric three-stage amplification structures, and is characterized in that each asymmetric three-stage amplification structure comprises three asymmetric amplification units, namely a first-stage amplification unit, a second-stage amplification unit and a third-stage amplification unit; the twoasymmetric three-stage amplification mechanisms are opposite in position and arranged in an overlapped mode, two contacted input ends are connected, two contacted amplification fixing rods are connected, and two contacted output ends are connected. The invention further discloses an amplification method of the three-stage micro-displacement amplification mechanism. According to the mechanism andmethod, larger displacement magnification times can be realized, and the space occupied by an invalid part of the magnification effect in a traditional axial symmetry mode is effectively avoided.

Description

technical field [0001] The invention relates to a micro-nano technology, in particular to a three-stage micro-displacement amplification mechanism and an amplification method thereof. Background technique [0002] Micro-nano technology (MEMS, nano technology) is the abbreviation of micro-electromechanical systems (MEMS) technology and nano science and technology (nano science and technology, nano ST). [0003] The precision platform using magnetostrictive material as the driver can be widely used in the micro-nano field. For some environments that require a lower output range, such as below 100um, or some environments that have no limit on the size of the driver, the magnetostrictive driver can be completed alone Movement does not require auxiliary equipment, but in some fields with large output requirements and / or environments where the size of the drive is limited, it is not enough to rely solely on the magnetostrictive drive to complete the job. At this time, a device fo...

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Problems solved by technology

[0005] The working principle of the flexible displacement amplification mechanism is to rely on the elastic deformation of the flexible hinge to move. In order to avoid errors caused by parasitic motion and temperature load, the configuration of the mechanism is mostly designed with axisymmetric design. However, there are some problems in this design: When the volume of the magnification mechanism remains unchanged, in order to ensure the symmetrical structure, the effective horizontal structure for the magnification is only half, and when the magnification is guaranteed, the overall horizontal structure will be doubled, so that the small Under the working conditions of volume and large magnification, the application of flexible displacement amplification mechanism will be limited

The amplifying mechanism is axisymmetric and has a large volume. It is necessary to place the driver inside the amplifying mechanism, and it is not suitable for the environment where the volume of the driver is limited.

[0010] With the continuous miniaturization of various precision devices, the academic and engineering circles have been looking for a displacement amplification mechanism with a large displacement amplification ratio and a small volume. Make a compromise, or make the displacement amplification mechanism an asymmetric structure, and realize it by sacrificing precision

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