Sensor base for reducing stress of shell on chip

Abstract

The invention discloses a sensor base for reducing the stress of a shell on a chip, and belongs to the technical field of sensors. The sensor base comprises a shell, and an oil filling cavity is formed in the bottom of the shell. A group of terminal pins penetrating through the oil filling shell is arranged along the axial circumference of the shell at the upper end of the oil filling cavity. First glass insulators are arranged outside the terminal pins. A mounting cavity is further formed at the upper end of the oil filling cavity. A kovar tube is fixedly arranged in the middle of the top ofthe mounting cavity. A second glass insulator is sintered outside the kovar tube. A first air guide hole is formed in the upper end of the kovar tube. The kovar tube and the second glass insulator arefirmly sealed by sintering, so that the shell is separated from a sensor chip fixed at the bottom of the kovar tube, and the independence of the position of the sensor chip is improved. Therefore, the stress of the shell on the sensor chip is isolated, the interference of the stress on the precision of the sensor is reduced, and the measurement precision of the sensor is improved.

Description

technical field [0001] The invention belongs to the technical field of sensors, and in particular relates to a sensor base for reducing the stress of a shell on a chip. Background technique [0002] The known piezoresistive pressure sensor is made by using the piezoresistive effect of single crystal silicon, that is, the principle that the resistivity of the material changes with the change of the applied pressure, and the shell of the base of the current pressure sensor and its chip are directly fixed Connect or set the boss to connect the chip. During the use of the sensor, it is generally connected to the pipeline under test by bolts or other methods. At this time, external stress will inevitably occur, resulting in the external stress of the base. The measurement accuracy of the chip is greatly disturbed, and the stress on the chip will cause the error of chip measurement to increase, and the measurement accuracy will be affected. Contents of the invention [0003] Th...

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Problems solved by technology

[0002] The known piezoresistive pressure sensor is made by using the piezoresistive effect of single crystal silicon, that is, the principle that the resistivity of the material changes with the applied pressure, and the shell of the base of the current pressure sensor and its chip are directly fixed Connect or set the boss to connect the chip. During the use of the sensor, it is generally connected to the pipeline under test by bolts or other methods. At this time, external stress will inevitably be generated, resulting in the external stress of the base. It greatly interferes with the measurement accuracy of the chip. The stress on the chip will increase the error of the chip measurement and affect the measurement accuracy.

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