Evaporation equipment

Abstract

The invention provides evaporation equipment. The evaporation equipment comprises an evaporation source and an angle limiting plate, wherein the evaporation source comprises an evaporation end surfaceprovided with a nozzle port; the nozzle port is used for outputting evaporation materials; a first accommodating tank is formed in the evaporation end surface near the nozzle port; the angle limitingplate is configured to limit an evaporation angle of the evaporation materials above the evaporation source; and a second accommodating tank is formed in the end surface, towards the nozzle port, ofthe angle limiting plate. The evaporation equipment is provided with the first accommodating tank on the evaporation end surface near the nozzle port and the second accommodating tank on the angle limiting plate, so that the material accumulated storage quantity on the evaporation end surface can be increased, and the problem of hole plugging phenomenon caused by growth of the evaporation materials on the surface of a nozzle cover of the evaporation source is prevented.

Description

technical field [0001] The present invention relates to the technical field of display panel production, in particular to an evaporation equipment. Background technique [0002] In the manufacture of organic light-emitting diode (Organic Light-Emitting Diode, OLED for short) display, the evaporation process is an essential process. [0003] Among the organic evaporation materials currently used in the evaporation process, some materials are relatively fluffy. Due to the special properties of the materials, the evaporation materials are easy to accumulate on the limiting plates on both sides of the evaporation source. As the evaporation time increases, when the evaporation on the limiting plate When the accumulation of plating material is too much, it will fall off, causing the evaporation material to grow on the surface of the nozzle cap of the evaporation source, resulting in a plugging phenomenon, which will eventually lead to abnormalities such as damage, downtime, and ma...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the technical solution of the present invention is to provide an evaporation equipment, which is used to solve the problem that during the evaporation process, the material on the limit plate accumulates and falls off, causing the evaporation material to grow on the surface of the nozzle cover of the evaporation source, resulting in plugging.

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