Vibration reduction system of ultra-high vacuum analysis and detection device
A technology of ultra-high vacuum and detection devices, which is applied in the direction of measuring devices, analyzing materials, and adopting mechanical devices, etc., can solve problems such as vibration, and achieve the effects of isolating vibration transmission, good vibration damping effect, and high stability
Active Publication Date: 2021-01-15
TSINGHUA UNIV
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Problems solved by technology
[0004] However, some mechanisms in the above-mentioned ultra-vacuum system, such as stepping motors, refrigerators, vacuum pumps, etc., will generate vibration during the working process, and the vibration will seriously affect the detection results of some analysis and detection devices. Therefore, how to reduce the ultra-vacuum The vibration of the high vacuum analysis and detection device has become a technical problem that needs to be solved urgently
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[0019] In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0020] Such as Figure 1-3 As shown, the vibration reduction system of the ultra-high vacuum analysis and detection device of the present invention includes analysis and detection devices 1, 2, 3, ultra-high vacuum pipeline 4 and vacuum pumping system 7 systems, and the samples of the analysis and detection devices 1, 2, 3 The cavity is an ultra-high vacuum environment, and the ultra-high vacuum pipeline 4 is provided with a sample transfer device, and the number of the analysis and detection devices is 3, and the sample cavities of the 3 analysis and detection devices are connected through the ultra-high vacuum pipeline 4. The detection sample is transferred to the sample cavity of the analysis and detection device 1, 2, 3 by the...
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The invention discloses a vibration reduction system of ultra-high vacuum analysis and detection devices. The analysis and detection devices and an ultra-high vacuum pipeline are installed above an air floating optical platform, and a vacuum pumping system is installed below the air floating optical platform. Part of the structure of the vacuum pumping system is connected with the ground. The ultra-high vacuum pipeline is provided with a quick release interface. Double-bellows connecting sections are arranged in the middle of the ultra-high vacuum pipeline. A molecular pump adopts a three-in-one mode, and each ultra-high vacuum sample chamber is internally provided with a spring-electromagnetic damping composite vibration reduction system body. The vibration amplitude of the devices can bereduced through the composite and systematic vibration reduction, and the requirements of the ultra-high vacuum analysis and detection devices for the vibration amplitude are met.
Description
technical field [0001] The invention relates to a vibration reduction system, in particular to a vibration reduction system of an ultra-high vacuum analysis and detection device, in particular to an ultra-high vacuum analysis and detection device used in a high-resolution in-situ real-time frictional energy dissipation measurement system damping system. Background technique [0002] Friction is a ubiquitous phenomenon in the material world. In recent years, the discovery of superslip phenomenon has attracted great attention from scholars in the fields of tribology, mechanics, physics and even chemistry. To study the inner mechanism of superslip phenomenon requires the use of high-resolution in-situ real-time friction energy Dissipative measurement system. [0003] The ultra-high vacuum analysis and detection device is an important part of the high-resolution in-situ real-time frictional energy dissipation measurement system. It is an important place for the analysis and res...
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IPC IPC(8): F16F15/03F16F15/04G01N19/00
CPCF16F15/022F16F15/03F16F15/04G01N19/00
Inventor 刘大猛庞华房亮王冲雒建斌
Owner TSINGHUA UNIV