Detection system and detection method thereof

Abstract

The invention discloses a detection system and a detection method thereof. The system comprises at least two X-ray sources with different ray intensities, an object carrying device, a processing system and at least two detection imaging systems. The X-ray sources, the object carrying device and the detection imaging system are configured as follows: rays generated by the X-ray sources irradiate asample arranged on the object carrying device in a penetrating mode, the detection imaging system receives ray photons attenuated through the sample to form gray level images and sends the gray levelimages to the processing system and the gray level images are spliced in the processing system. According to the invention, the X-ray sources with different ray intensities are adopted to penetrate the sample to obtain different grayscale images, and the grayscale images are spliced to obtain a spliced image capable of completely displaying internal defects of the sample; the spliced image is usedas the basis of subsequent image processing and defect identification, so that the detection result deviation caused by the difference of X-ray absorption degrees in different parts of the sample canbe avoided and thus the quality evaluation accuracy of the sample is improved.

Description

technical field [0001] The invention relates to the technical field of defect detection, in particular to a detection system and a detection method thereof. Background technique [0002] In the production process of integrated circuit packaging, it is necessary to conduct on-line detection of various defects on the packaged products. Among them, X-ray inspection technology, as one of the common methods of industrial non-destructive testing, is often used for defect detection of packaged products, such as bubbles inside the package injection molding body, disconnection of connecting wires, or abnormal defects of package pins, etc., especially bubbles It is difficult to obtain effective detection and detection results for defects by other detection methods, and X-ray detection is one of the better detection methods for bubble defect detection. [0003] The X-ray detection method in the prior art is to use X-ray transmission to package the product, perform photoelectric conver...

AI Technical Summary

Problems solved by technology

[0005] Aiming at the deficiencies of the prior art, the present invention provides a detection system and its detection method to solve the problem of low accuracy in the quality evaluation of integrated circuit packaging products in the prior art

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