Nanoimprint structure, control method thereof, nanoimprint apparatus, and patterning method

Abstract

The invention discloses a nanoimprint structure, a control method thereof, a nanoimprint device and a composition method. A bearing structure is arranged on a magnetic connecting rod, a soft film plate is arranged to be an annular soft film plate; the annular soft film plate sleeves the position, with the bearing structure, of the magnetic connecting rod; the bearing structure is controlled to rotate around the magnetic connecting rod; the impressing pattern of the annular soft film plate is driven to move in the second direction; the bearing structure is controlled to slide on the magnetic connecting rod; according to the method, the impressing pattern of the annular soft film plate is driven to move in the first direction, so that one annular soft film plate is arranged, the compositionof the substrate can be completed by adjusting the area where the impressing pattern is located, the problem of composition uniformity caused by splicing of multiple soft film plates is solved, and the production cost is greatly saved.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a nanoimprint structure, a control method thereof, a nanoimprint device and a patterning method. Background technique [0002] Using nanoimprint technology for patterning, because it can form nanoscale dimensions, it can make the display panel achieve high resolution, and it also has the advantages of simple process, ultra-low cost, and high productivity. It is widely used in LEDs, semiconductors, etc. The field of micro-nano manufacturing is considered to be one of the promising next-generation lithography technologies. [0003] In the existing nanoimprinting process, due to the limitation of the size of the hard template, the hard template can only be copied multiple times, and multiple soft templates can be copied, so that the position of the embossed pattern in each soft film plate is different. The different positions of the substrate are patterned by the board, so that th...

AI Technical Summary

Problems solved by technology

However, in the process of forming the soft template, each soft film board needs to copy the graphics on the hard template separately, and it cannot be guaranteed that the direction of the grating on the hard template copied each time is consistent, which will cause the final copied The quality of the soft template is not good. When patterning the substrate, it will lead to poor uniformity of the graphics on the substrate and affect the display quality.

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