Systems and methods for testing calibrated blackbody radiation sources fabricated using mems technology

Abstract

This manual provides a system and method for testing the life of a calibration black body radiation source processed by MEMS technology. The system includes a vacuum test device and a high and low temperature chamber; the vacuum test device includes a vacuum test chamber, a first stage, a refrigeration mechanism and an infrared Imaging thermometer; the first stage is set in the vacuum chamber of the vacuum test chamber; the first stage is provided with a first power interface; the refrigeration component of the refrigeration mechanism is used to maintain a specific low temperature environment for the vacuum test chamber; There is a measurement window on the body of the vacuum test chamber; the infrared imaging thermometer is set at the measurement window; the high and low temperature chamber includes a body and a second stage for carrying the calibration black body radiation source to be tested; the second The stage is provided with a second power supply interface. Because the aforementioned system can simulate the working environment of an orbiting star, it provides an effective basis for calibrating whether the black body radiation source can be loaded on the star.

Description

technical field [0001] The invention relates to the technical field of instruments and meters, in particular to a system and method for testing a calibrated blackbody radiation source manufactured by MEMS technology. Background technique [0002] During the work of the spaceborne infrared remote sensing system, the detection performance of the infrared detector will drift, which will affect the accuracy of infrared observation. In order to achieve quantitative detection, it is necessary to use a calibration blackbody to regularly calibrate the performance of the infrared detector operating in orbit. In order to cover the temperature detection range of the infrared detector and meet the high-precision detection requirements of the infrared detector within the temperature detection range, the calibration blackbody needs to have a wide calibration temperature range and multi-point calibration capability. [0003] The industry has begun to use MEMS process technology to manufac...

AI Technical Summary

Problems solved by technology

Due to the particularity of the environment of the star in orbit, the test environment needs to simulate the working environment of the MEMS calibration blackbody in the orbit environment as much as possible, and the environmental change characteristics caused by its own temperature change; however, under the current ground conditions, it is not possible to truly simulate the aforementioned environment with temperature changes

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