A compact rigid-flexible coupling platform connection structure and its multi-axis motion platform

Abstract

The invention discloses a compact rigid-flexible coupling platform connection structure and a multi-axis motion platform formed thereof, including an upper platform, a lower platform, a motion detection element and a driving device, and the base of the upper platform is designed as a rigid-flexible coupling structure and installed on the lower layer The driving device is installed on the platform guide rail and the lower platform, and the driving device drives the upper platform to move along the direction of the guide rail; the motion detection element detects the displacement or speed of the upper platform frame, and the second detection element is optional to detect the deformation or deformation of the flexible hinge speed. The present invention integrates the bottom of the upper platform with the lower platform, eliminating the need for an intermediate connecting plate, so that the overall center of gravity of the platform is reduced, the structure is compact, and the Z direction is flatter, and multi-layer platforms can be superimposed to realize multi-degree-of-freedom movement and flexibility To build the required multi-degree-of-freedom high-precision motion platform. In addition, the rigid-flexible coupling connection structure of the present invention adopts a sandwich-type flexible hinge, while ensuring no assembly error and fatigue life.

Description

technical field [0001] The invention relates to a rigid-flexible coupling platform, in particular to a compact rigid-flexible coupling platform connection structure and a multi-axis motion platform formed thereof. Background technique [0002] Large-stroke high-precision motion platforms are widely used in semiconductor packaging and other fields. In order to comprehensively take into account the requirements of both large stroke and high precision, the macro-micro composite motion platform is widely used in the design of the above-mentioned large stroke high-precision motion platform. In a typical macro-micro compound motion platform, the problem of friction dead zone can be effectively solved based on the flexible hinge, and it has the advantage of greatly improving the positioning accuracy without increasing the cost. Therefore, the micro-motion platform often adopts the flexible hinge-based Design. For example, Patent No. CN201310065603.5 discloses a coaxial macro-micr...

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Problems solved by technology

However, the two-dimensional micro-motion mechanism based on the flexible hinge of the above two patents also has a weak carrying capacity, and it is difficult to continue to be used in the construction of a large-stroke high-precision motion platform with a higher degree of freedom

Therefore, the patent No. CN201710883865.0 discloses a large load-bearing flexible hinge and a multi-degree-of-freedom combination method. This patent uses a large-load-bearing space flexible mechanism to realize the multi-degree-of-freedom mechanism combined by rigid-flexible coupling platforms. However, the upper layer The entire base of the platform is installed on a flexible platform, with a high center of gravity, large overturning moment, and easy deformation

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