A High Overload Resistant Absolute Resonant Micro-Pressure Sensor
A micro-pressure sensor, absolute technology, applied in elastic deformation gauge-type fluid pressure measurement, instrument, measurement of fluid pressure, etc., can solve the problems of stress concentration, sensor chip damage, undiscovered range resonance type absolute micro pressure sensor, etc. , to achieve the effect of high overload protection
Active Publication Date: 2021-07-16
合肥庐阳科技创新集团有限公司
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Problems solved by technology
This is because there are structures such as pressure film and resonant beam in the resonant pressure sensor. In the case of high overload, if conventional overload protection methods are used, such as introducing structures such as bosses, it is easy to cause stress concentration and damage the sensor chip. Therefore, how to It is an urgent problem to effectively solve the overload protection of the resonant absolute micro pressure sensor
At present, there is no report on the resonant absolute micro-pressure sensor with a range much smaller than one standard atmospheric pressure.
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[0034] Below in conjunction with accompanying drawing, the present invention will be further described through embodiment.
[0035] see figure 1 , figure 2 , image 3 , an anti-high overload absolute resonant micro-pressure sensor, including an upper end cover 1, a fastening ring 2, a first corrugated diaphragm 3, an intermediate housing 4, a second corrugated diaphragm 5, a lower end cap 6, and a micro-pressure sensor Chip 7, sealed tube shell 8, switch guide rod 9, gas channel 10, balance spring 11, getter 12;
[0036] The upper end cover 1 includes an air inlet 101, an upper end cover chamber 102 and an upper end cover gas channel 103, and the air inlet 101 is used for the gas to be measured to enter the sensor;
[0037] Intermediate housing 4 comprises intermediate housing first chamber 401, intermediate housing second chamber 404, intermediate housing gas channel 403 and guide hole 402, and the diameter of guide hole 402 is slightly larger than the diameter of switch ...
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The invention discloses an anti-high overload absolute resonant micro-pressure sensor, which comprises an upper end cover, an intermediate shell, a lower end cover, a gas channel, a micro-pressure sensor chip, a sealed tube shell and a double corrugated film for controlling the on-off of external gas A pressure switch composed of a piece, a switch guide rod, a balance spring, etc. When the ambient pressure of the sensor is higher than the safety threshold measured by the chip, the pressure switch is closed, and the gas will not act on the micro-pressure sensor chip to achieve high overload protection; when the air inlet pressure is lower than the safe threshold measured by the chip, When the pressure switch is turned on, the external gas acts on the back cavity of the chip through the gas channel, causing the deformation of the sensitive diaphragm, which in turn causes the natural frequency change of the resonant beam fixed above the sensitive diaphragm, and the micro-pressure measurement can be realized by measuring the resonant frequency . The invention better solves the technical bottleneck that the traditional MEMS resonant pressure sensor is difficult to use for absolute micro-pressure measurement, and has the advantages of high measurement sensitivity, high resolution and the like.
Description
technical field [0001] The invention relates to the technical field of resonant sensors, in particular to an anti-high overload absolute resonant micro-pressure sensor. Background technique [0002] Pressure is an important physical quantity that needs to be monitored in industrial production. In order to obtain accurate pressure data, various sensors for measuring pressure have extensive demands. Among them, micro-pressure measurement is an important branch of pressure measurement, especially airborne equipment such as aerospace has a great demand for absolute micro-pressure measurement below 1Kpa. There is an urgent need for absolute micro-pressure sensors with high precision, high resolution, and high sensitivity. In order to improve the sensitivity of the sensor, reducing the range of the sensor is a very important means. However, for an absolute micro-pressure sensor with a range as low as 1kPa, if the sensor is in an atmospheric environment, it will face hundreds of...
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IPC IPC(8): G01L19/06G01L7/10
CPCG01L7/10G01L19/0618
Inventor 程荣俊宋鹏程张何洋黄强先张连生
Owner 合肥庐阳科技创新集团有限公司