Installation framework and installation method for mechanical arm of wet processing equipment
A technology of mechanical arm and wet processing, which is applied in the direction of manipulators, mechanical equipment, fixing devices, etc. It can solve the problems of device misalignment, equipment deformation danger, etc., and achieve the effect of ensuring installation strength and avoiding shaking
Active Publication Date: 2021-11-05
江苏启微半导体设备有限公司
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Problems solved by technology
In the traditional installation process, during the horizontal movement, vertical lifting movement, clamping wafer box / piece movement and high-speed movement of the robotic arm on the wet process equipment, there may be potential dangers of equipment deformation and Possibility of device misalignment
Method used
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[0032] In describing the present invention, it should be understood that the terms "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", The orientation or positional relationship indicated by "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than Nothing indicating or implying that a referenced device or element must have a particular orientation, be constructed, and operate in a particular orientation should therefore not be construed as limiting the invention.
[0033] This embodiment provides a mechanical arm installation framework for wet processing equipment, including an equipment frame 2, an installation vertical plate 4, an installation column 1, and installation bolts, wherein the installation column 1 is fitted and installed in the equipme...
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The invention discloses an installation frame of a mechanical arm of wet processing equipment and an installation method thereof. The installation frame includes an equipment frame, an installation vertical plate, an installation column and installation bolts, and the equipment frame is welded by hollow metal square steel , the metal square steel is provided with a mounting hole at the mounting point of the mounting column, the mounting hole runs through the two opposite side walls of the metal square steel, and the mounting column is arranged between the two mounting holes and connected to the The metal square steel is fixed, one end of the installation column is provided with threaded holes along the length direction of the central axis, and the installation vertical plate is provided with fixing holes at the corresponding installation points. The installation vertical plate and the equipment When the frame is installed correspondingly, the axis of the fixing hole coincides with the axis of the threaded hole and is fixed by the installation bolt. The present invention embeds the mounting column into the equipment frame, and the mounting column can provide sufficient strength and rigidity to avoid shaking of the mechanical arm during movement.
Description
technical field [0001] The invention belongs to the technical field of wet processing equipment, and in particular relates to a mounting frame for a mechanical arm of wet processing equipment and an installation method thereof. Background technique [0002] Semiconductor wet process equipment is constantly moving at high speed in the wafer loading / unloading area, cleaning process area, and wafer drying area through a specific mechanical arm device, and the configuration corresponding to the mechanical arm needs to be effectively installed in the wet process. On the skeleton of the processing equipment, configure the relevant modules. In the traditional installation process, during the horizontal movement, vertical lifting movement, clamping wafer box / piece movement and high-speed movement of the robotic arm on the wet process equipment, there may be a potential danger of equipment deformation and Possibility of device misalignment. Contents of the invention [0003] Aimi...
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IPC IPC(8): B25J19/00F16B1/02B25J11/00
CPCB25J11/00B25J11/0095F16B1/02
Inventor 邓信甫李志峰蔡嘉雄王雪松陈佳炜
Owner 江苏启微半导体设备有限公司