A partial top-bending correction mechanism of the inner wall of the movable vacuum chamber divided into sectors
A technology of vacuum chamber and sub-sector is applied in the field of partial top-bend correction mechanism of the inner wall of movable vacuum chamber sub-sector, which can solve the problems of inability to continuously correct by sector, difficulty in ensuring accuracy, and large correction workload, etc., and achieves a compact structure. , the effect of improving accuracy and reducing labor costs
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[0031] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0032] Please refer to the accompanying drawings, a partial top bending correction mechanism for the inner wall of a movable vacuum chamber, including a support base 1, a track 2, a vertical fixing system, a guiding system, a positioning system, a driving system and a hydraulic system, wherein:
[0033] The support base 1 is fixedly arranged on the inner wall 3 of the sub-sector of the vacuum chamber. Specifically, the support base 1 includes an annular frame 2...
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