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Mask and preparation method

A mask and mask technology, applied in semiconductor/solid-state device manufacturing, ion implantation plating, coating, etc.

Inactive Publication Date: 2020-06-05
HEFEI VISIONOX TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Based on this, it is necessary to provide a mask and a preparation method for the problem that the position change of the mask opening area on the mask directly affects the coating accuracy during the evaporation process.

Method used

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  • Mask and preparation method

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Embodiment Construction

[0048] In order to make the purpose, technical solution and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present application, and are not intended to limit the present application.

[0049] In the current evaporation process, the organic light-emitting material is usually evaporated to a designated position on the substrate by using a precision mask. During the evaporation process, due to the magnetic field and the downward pressure of the substrate, the mask strips in the mask may shift left and right, or even deformed, causing evaporation deviation, which in turn causes problems such as color mixing and mura on the screen that affect the display effect. In addition, the mask strip may also be shifted during the cleaning and transportation process aft...

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Abstract

The invention relates to a mask and a preparation method. The mask plate comprises a frame, a support bar and a mask bar. The support bar is provided with a first mounting part. The mask bar is provided with a first fixing part. The first mounting part is matched with the first fixing part in shape to fix the mask bar. In the embodiment of the invention, an overlapped area of the support bar and the mask bar is fixedly connected with the first fixing part through the first mounting part, so that the offset of the mask bar can be reduced, the problem of poor color mixing of a display panel caused by the flowing of the mask bar is solved, and the product yield is improved. Simultaneously, the overlapped area of support bar and mask bar is fixedly connected with the first fixing part throughthe first mounting part, so that the effect of reinforcing the whole mask is achieved, and the risk of vibration damage of the mask in transportation, cleaning, abutting, laminating and other processes can be reduced, the service life is prolonged, and the production cost is reduced.

Description

technical field [0001] This application relates to the field of display technology, in particular to a mask and a preparation method. Background technique [0002] In the manufacturing process of organic light-emitting display devices, organic materials are deposited on the substrate above the evaporation source by high-temperature evaporation. In order to evaporate the organic materials to a specific position according to the design, a mask is required under the substrate. A pre-designed mask opening area is left on the mask plate, through which the organic material is deposited on the substrate to form a preset pattern. The position change of the mask opening area on the mask directly affects the precision of the coating. Contents of the invention [0003] Based on this, it is necessary to provide a mask and a preparation method for the problem that the position change of the mask opening area on the mask directly affects the coating accuracy during the evaporation proc...

Claims

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Application Information

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IPC IPC(8): C23C14/04C23C14/12C23C14/24H01L51/56
CPCC23C14/042C23C14/12C23C14/24H10K71/166H10K71/00
Inventor 王梦凡陈涛
Owner HEFEI VISIONOX TECH CO LTD
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