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Flexible linkage reciprocating pump

A reciprocating pump, flexible technology, applied to pumps with flexible working elements, pumps, components of pumping devices for elastic fluids, etc., can solve the vibration of wafer cleaning nozzles, unfavorable fluid flow rate adjustment and control, and affect cleaning Efficiency and other issues

Active Publication Date: 2020-06-05
ZHEJIANG CHEER TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This kind of pulsation is not conducive to the adjustment and control of parameters such as fluid flow rate, and can also cause some failures. Make the wafer cleaning nozzle oscillate and affect the cleaning efficiency

Method used

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Experimental program
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Effect test

no. 2 approach

[0037] In the previous embodiments, the flexible telescoping part of the pump shaft is located inside the pump shaft. Such as Figure 5 As shown, in this embodiment, the flexible telescoping part of the pump shaft is located outside the pump shaft. This embodiment, like the first embodiment, can achieve the effect of flexible linkage, and can realize the partial overlap of the contraction sequence of the left and right bellows, thereby achieving the effect of reducing output flow pulsation.

no. 3 approach

[0039] In the previous embodiments, the flexible linkage reciprocating pump has a pair of left and right symmetrical flexible telescopic parts. Such as Figure 6 As shown, in this embodiment, there is not necessarily a pair of symmetrical flexible telescopic parts on the left and right, and they can be asymmetrical, or even have flexible telescopic parts on the left and no flexible telescopic parts on the right. This embodiment can also achieve the effect of flexible linkage, and can realize the partial overlap of the contraction sequence of the left and right bellows, thereby achieving the effect of reducing output flow pulsation.

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PUM

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Abstract

The invention provides a flexible linkage reciprocating pump. Flexible expansion assemblies are arranged in connecting devices of pump shafts and corrugated pipes, so that flexible connection exists between motion of the pump shafts and motion of the corrugated pipes. The compression and stretching motion time sequence of the corrugated pipes are controlled. At least one corrugated pipe is kept inthe continuous compression process. Zero points of output flow are eliminated. Accordingly, pulsation of the output flow is reduced. Flexible linkage components at the two ends are connected in series. The requirement for the symmetry degree of the flexible linkage components at the two ends is reduced. Therefore, the machining difficulty of the flexible linkage reciprocating pump is reduced.

Description

technical field [0001] The invention belongs to the technical field of pumps and relates to a flexible linkage reciprocating pump. Background technique [0002] In the fields of semiconductor manufacturing, high-purity chemical engineering, and biomedicine, there are many occasions that require the use of high-purity fluids. As a fluid power source, reciprocating pumps are widely used in high-purity fluid systems due to their low pollution characteristics. The basic principle of the reciprocating pump is to inhale the fluid from the pipeline into the pump cavity or squeeze the fluid from the pump cavity into the pipeline by changing the volume of the flexible pump cavity, thereby generating a periodic fluid driving force. Since the way of generating power comes from the deformation of the pump chamber, there will be no sliding friction, so there will be no pollution particles due to friction, and the existence of sliding motion pairs will not cause pollutants to migrate fro...

Claims

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Application Information

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IPC IPC(8): F04B1/02F04B53/16F04B53/10F04B53/14F04B53/00F04B11/00
CPCF04B43/1136F04B53/16F04B53/1032F04B53/1035F04B53/14F04B53/144F04B53/00F04B11/00
Inventor 不公告发明人
Owner ZHEJIANG CHEER TECH CO LTD
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