Automatic leveling method for large-aperture planar optical element

Abstract

The invention discloses an automatic leveling method for a large-aperture planar optical element, and the method employs an automatic leveling device which comprises a sample leveling platform, a three-dimensional displacement platform, three laser displacement sensors, a data collection unit, a data analysis and processing unit, and a control unit. Before automatic leveling, initial relative distance calibration is carried out on the three laser displacement sensors; when automatic leveling is carried out, the three laser displacement sensors provide relative distances of three correspondingsampling points on the planar optical element at the same time, the relative distances are fed back to the control unit after being analyzed and processed, and pitching and rotating angle leveling iscarried out. In the leveling process, the relative distances of the three sampling points are fed back in real time, the movement amount of the sample leveling platform is corrected, and closed-loop control is achieved. The method is simple in operation step, does not need to scan the large-aperture planar optical element, greatly improves the leveling speed, and achieves the non-contact, quick and automatic leveling of the large-aperture planar optical element.

Description

technical field [0001] The invention belongs to the field of optical technology, and in particular relates to an automatic leveling method for a large-caliber plane optical element. Background technique [0002] In the context of the demand for large-scale optical devices such as space telescopes and laser drives, the processing of optical components is also developing in the direction of large-aperture and high-precision. As one of the most commonly used optical components in optical devices, planar optical components, such as mirrors and optical windows, play an irreplaceable and important role. The diameter of planar optical components is getting bigger and bigger, and the requirements for surface precision are getting higher and higher, which also poses a more severe test to the detection technology of large-caliber planar optical components. At present, the microscopic imaging system is mainly used to scan and image the surface of the inspected sample, so as to obtain ...

AI Technical Summary

Problems solved by technology

This method requires the use of a microscope to sample three feature points on the surface. When the processing quality of the optical element to be inspected is good, the distribution of feature points is less, and it is often difficult to find suitable feature points; in addition, it is necessary to move the microscope to the three feature points , increasing the time required to level the

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