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A support tool and working method for avoiding intermediate deformation during wafer coating

A working method and wafer technology, applied in workpiece clamping devices, manufacturing tools, electrical components, etc., can solve problems that cannot be eliminated, affect process production, coating quality problems, etc., reduce or eliminate warpage, eliminate a A series of bad conditions, the effect of enhancing the quality of the coating

Active Publication Date: 2022-05-13
华天慧创科技(西安)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The sinking of the wafer will lead to the quality problem of the coating film, and the warpage that cannot be eliminated after the coating will affect the post-production process

Method used

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  • A support tool and working method for avoiding intermediate deformation during wafer coating
  • A support tool and working method for avoiding intermediate deformation during wafer coating
  • A support tool and working method for avoiding intermediate deformation during wafer coating

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Experimental program
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Embodiment Construction

[0026] The present invention will be further described below in conjunction with the accompanying drawings.

[0027] see figure 1 and figure 2 , the present invention includes a coating support 1, the coating support 1 is provided with a wafer placement platform 2, the wafer placement platform 2 and the coating support 1 form a ring-shaped step structure, and the top of the wafer placement platform 2 is provided with an upper suction cup 3, an upper suction cup 3 There are a number of suction cup columns 4 fixed on the top, at least one suction cup column 4 is provided with an upper suction cup vacuum channel 5, and the upper suction cup 3 is connected to a vacuum pump through the upper suction cup vacuum channel 5, and a side suction cup 6 is set on the suction cup column 4, and a side suction cup 6 is set on the side suction cup 6 There is a side suction cup vacuum passage 7, and the side suction cup vacuum passage 7 is connected with a vacuum pump.

[0028] When the side...

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PUM

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Abstract

The invention discloses a bracket tool and a working method for avoiding intermediate deformation during wafer coating. The invention absorbs the upper suction cup on the upper surface of the wafer, and applies a horizontal pulling force to the upper suction cup through the side suction cup, so that the wafer will be flattened. The wafer will no longer sink during coating, thus eliminating a series of adverse conditions caused by wafer sinking. The invention can solve the sinking problem caused by gravity when the wafer is coated, can reduce or eliminate the warping of the wafer after coating, and the reduction or elimination of the warping provides convenience for the smooth progress of subsequent processes. Solving the sinking caused by gravity can enhance the coating quality.

Description

technical field [0001] The invention belongs to the field of coating tooling, and in particular relates to a bracket tooling and a working method for avoiding intermediate deformation during wafer coating. Background technique [0002] The existing wafer coating support is only a ring with steps. When coating, the wafer is placed on it, and the wafer glass will sink freely due to the effect of gravity. The sinking of the wafer will lead to the quality problem of the coating, and the warpage that cannot be eliminated after coating will affect the post-production process. Contents of the invention [0003] The object of the present invention is to overcome above-mentioned deficiency, provide a kind of support tooling and working method that avoids intermediate deformation during wafer coating, can prevent the middle part of wafer from sinking, can eliminate a series of unfavorable conditions that wafer sinking brings. [0004] In order to achieve the above object, the pres...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67H01L21/683B25B11/00
CPCB25B11/005
Inventor 王林李菲
Owner 华天慧创科技(西安)有限公司
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