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Lock valve for vacuum sealing, vacuum chamber and vacuum processing system

A technology for vacuum sealing and locking valves, which is applied in the field of locking valves and can solve problems such as mechanical stress pollution

Inactive Publication Date: 2020-06-12
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Contamination can occur, for example, due to mechanical stress on the lock valve components caused by pressure changes during evacuation of the vacuum chamber

Method used

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  • Lock valve for vacuum sealing, vacuum chamber and vacuum processing system
  • Lock valve for vacuum sealing, vacuum chamber and vacuum processing system
  • Lock valve for vacuum sealing, vacuum chamber and vacuum processing system

Examples

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Embodiment Construction

[0020] Reference will now be made in detail to various embodiments, one or more examples of which are illustrated in the drawings. Each example is provided by way of explanation, not intended as limitation. For example, features illustrated or described as part of one embodiment can be used on or in conjunction with any other embodiment to yield still a further embodiment. The present disclosure is intended to cover such modifications and variations.

[0021] In the following description of the drawings, the same reference numerals denote the same or similar components. In this disclosure, only differences with respect to individual implementations are described. Unless otherwise specified, descriptions of parts or aspects in one embodiment are also applicable to corresponding parts or aspects in another embodiment.

[0022] Before describing various embodiments of the present disclosure in more detail, some aspects regarding some terms and expressions used herein are expla...

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Abstract

A lock valve (100) for vacuum sealing is described. The lock valve (100) includes a base structure (110) having a valve opening (111), a shutter (140) for closing the valve opening (111), and a sealing (160). The sealing includes a sealing base (161) connected to the base structure (110) and a sealing top (162) for providing a sealing contact with the shutter (140). The sealing base (161) has a higher stiffness than the sealing top (162).

Description

technical field [0001] Embodiments of the present disclosure relate to lockout valves for vacuum sealing. In particular, the present disclosure relates to vacuum-tight lockout valves for vacuum chambers of vacuum processing systems. Additionally, the present disclosure relates to vacuum chambers with lock valves for transferring substrates from atmospheric conditions to vacuum conditions. Additionally, the present disclosure relates to vacuum processing systems for processing substrates, particularly inline vacuum processing systems for processing large area substrates. Background technique [0002] Usually e.g. at 5*10 -4 The substrate is coated in a vacuum processing system or vacuum coating apparatus under high vacuum conditions at a pressure in the range of hPa to 0.5 hPa. To increase tool productivity and avoid having to evacuate the entire facility and especially the high vacuum section for each substrate, load and unload locks (or entry and exit chambers) are used ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16K51/02C23C14/56F16J15/06F16J15/10F16J15/12F16K1/46
CPCC23C14/566C23C16/4409F16J13/18F16J15/104F16J15/122F16K1/465F16K51/02
Inventor 拉尔夫·林登贝格马丁·凯梅尔布里希·拉贾
Owner APPLIED MATERIALS INC