Cascaded cross-scale tool servo device and high-frequency control method thereof

A servo device and cross-scale technology, applied in the field of microstructure ultra-precision cutting, can solve the problems of limiting the manufacturing capacity of complex microstructure surfaces, the difficulty of high-frequency trajectory tracking of FTS systems, and increasing manufacturing costs.

Active Publication Date: 2020-08-04
NANJING UNIV OF SCI & TECH
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Problems solved by technology

Under the constraints of the motion bandwidth of the FTS drive system and the servo cycle update capability of the commercial controller, the high-frequency trajectory tracking of t

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  • Cascaded cross-scale tool servo device and high-frequency control method thereof
  • Cascaded cross-scale tool servo device and high-frequency control method thereof
  • Cascaded cross-scale tool servo device and high-frequency control method thereof

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[0061] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0062] The implementation of the present invention will be described in detail below in conjunction with specific embodiments.

[0063] see Figure 1-4 As shown, a cascaded cross-scale tool servo turning device includes: a flexible device platform 1, a first piezoelectric stack 9, a second piezoelectric stack 6; a first piezoelectric stack 9, a second piezoelectric stack The stack 6 is respectively preloaded by the first wedge block 8 and the second wedge block 3, and is installed on the flexible device platform 1 by the wedge block preload screw 1 and the wedge block preload screw 2; the first ca...

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Abstract

The invention discloses a cascaded cross-scale tool servo device and a high-frequency control method thereof. The device comprises a flexible device platform, a first piezoelectric stack, a second piezoelectric stack, a first capacitive displacement sensor, a second capacitive displacement sensor, a diamond cutter, straight circular flexible hinges and straight plate type flexible hinges. The diamond tool is located at the front end of the middle of the flexible device platform, the first piezoelectric stack is located on the lower portion of the diamond tool, the straight plate type flexiblehinges are located on the two sides of the first piezoelectric stack driving block, the second piezoelectric stack is located on the lower portion of the first piezoelectric stack, and the straight circular type flexible hinges are located on the two sides of the second piezoelectric stack driving block. According to the cross-scale rapid tool servo system based on cascade driving of two piezoelectric stacks and guiding of the flexible mechanism, the primary driving stroke is large, the bandwidth is low, the secondary driving stroke is small, the bandwidth is high, and the requirements of complex microstructure cutting for large-stroke, high-bandwidth and high-precision tool path tracking can be effectively met through combination of the primary driving stroke and the secondary driving stroke.

Description

technical field [0001] The invention belongs to the technical field of microstructure ultra-precision cutting, and in particular relates to a cascaded cross-scale tool servo device and a high-frequency control method thereof. Background technique [0002] The diamond turning method based on Fast Tool Servo (hereinafter referred to as FTS) technology is considered to be a very promising manufacturing method for complex optical curved surfaces. [0003] At present, the commonly used drive methods for fast tool servo systems include electromagnetic drive and piezoelectric stack drive. Among them, electromagnetic drive is generally used as the drive source of large-stroke FTS, and the tool movement of hundreds of microns or even millimeters can be realized by means of an air-floating platform or a flexible mechanism. Limited by its low force density, its working bandwidth is generally only on the order of tens or hundreds of Hertz. Piezoelectric stacks have the advantages of f...

Claims

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Application Information

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IPC IPC(8): G05B19/19
CPCG05B19/19G05B2219/35349
Inventor 朱志伟赵东坡朱紫辉黄鹏陈栎卞雷祥
Owner NANJING UNIV OF SCI & TECH
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