Diffraction grating online detection device

Abstract

The invention discloses a diffraction grating online detection device, and relates to the field of optical processing. The device comprises a diffraction grating, a light source, a beam splitter and aprism; a notch groove surface is arranged on the diffraction grating; notch groove lines are arranged on the notch groove surface, and a grating angle is arranged between the notch groove line and areference surface; light emitted by the light source is divided into three beams of parallel light through the beam splitter; the beam splitter is perpendicular to the reference surface, and two reflecting surfaces of the prism are perpendicular to the reference surface. According to the invention, the notch groove lines are arranged on the diffraction grating; the light source is divided into three parallel light beams through the beam splitter; two diffracted light beams generated by the first light beam on the diffraction grating are utilized; the second light beam and the third light beamgenerate the first reflected light and the second reflected light under the action of the reflecting surface of the prism, and the propagation direction of the diffracted light is compared with the propagation direction of the reflected light, so that the relationship between the grating grooving direction and the reference surface is accurately judged, and the function of accurately positioning the diffraction grating is realized by utilizing a novel light path design.

Description

technical field [0001] The invention relates to the technical field of optical processing, in particular to an online detection device for a diffraction grating. Background technique [0002] Diffraction gratings have a large number of important applications in optical spectrum analysis, optical communication systems, AR / VR display technology and other fields. Diffraction gratings need to be precisely positioned in the direction of grating grooves during processing and installation, but the commonly used positioning methods are not easy to realize the online detection function, which affects the cost, efficiency and other comprehensive performance of the product. In order to solve the detection of the diffraction grating, "a detection method for the diffraction wavefront of the concave diffraction grating" of Chinese Patent No. CN102706542A discloses: the establishment of the detection system of the diffraction grating diffraction wavefront of the concave surface diffraction...

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Problems solved by technology

Diffraction gratings need to be accurately positioned in the direction of grating grooves during processing and installation, but the commonly used positioning methods are not easy to achieve online detection functions, which affect the cost, efficiency and other comprehensive performance of the product

In order to solve the detection of diffraction gratings, Chinese Patent No. CN102706542A "A Method for Detection of Diffraction Wavefronts of Concave Diffraction Gratings" discloses: the establishment of a detection system for diffraction gratings of concave diffraction gratings and the installation of components in the system, so as to realize the wavefront detection of diffraction gratings. However, this detection method can only realize the behavior before the wave detection, but cannot realize the online real-time detection of the diffraction grating, and the interferometer required by this invention is expensive, and requires a high cost in after-sales and maintenance

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