PT symmetric side-moving micro electro mechanical system

Abstract

The invention discloses a PT symmetric side-moving micro electro mechanical system. The micro electro mechanical system comprises a substrate, a first micro electro mechanical structure, a second micro electro mechanical structure, a first adjustable damping circuit and a second adjustable damping circuit, wherein the first micro electro mechanical structure and the second micro electro mechanicalstructure are arranged on the substrate, and the first micro electro mechanical structure and the second micro electro mechanical structure share the substrate and are of a mirror symmetry structure;the equivalent damping of the first adjustable damping circuit acting on the first micro electro mechanical structure and the equivalent damping of the second adjustable damping circuit acting on thesecond micro electro mechanical structure are opposite in sign and equal in size. According to the invention, the micro electro mechanical system can obtain perturbation response performance with higher sensitivity.

Description

technical field [0001] The invention relates to the technical field of microelectronics, in particular to a PT symmetrical lateral motion microelectromechanical system. Background technique [0002] In 1998, Professor C. M. Bender of the University of Washington in the United States proposed a PT symmetric Hamiltonian. This Hamiltonian does not have Hermitianness, but it also has real solutions. Here P and T represent parity (Parity) transformation and time (Time) transformation respectively. After Professor Bender proposed the concept of PT symmetry, many international scholars and research institutions quickly joined in the research of this non-Hermitian PT symmetry. So far, the theoretical framework of PT symmetric non-Hermitian quantum systems has been basically formed. [0003] In addition to research in quantum systems, PT symmetry theory has also been verified in different types of classical physical systems, and some special properties and phenomena of PT symmetric...

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Problems solved by technology

However, the current research on PT symmetric systems is mainly focused on optical systems and electrical systems, and there are no research reports on PT symmetric systems based on MEMS.

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