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Test methods for thin film encapsulation

A test method and thin-film packaging technology, which can be used in measurement devices, suspension and porous material analysis, permeability/surface area analysis, etc., and can solve problems such as errors, wrong measurement results, and thin-film defects

Active Publication Date: 2021-06-18
JILIN UNIV
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Problems solved by technology

For the laminated test unit, the packaging film and the calcium sensor are in close contact, and the change in the space structure of the calcium metal element will inevitably affect the structure of the packaging film, and defects in the film will form water vapor penetration paths, which are introduced during the calcium corrosion test. error, resulting in wrong WVTR measurement results

Method used

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  • Test methods for thin film encapsulation
  • Test methods for thin film encapsulation
  • Test methods for thin film encapsulation

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Embodiment Construction

[0051] In order to enable those skilled in the art to better understand the solutions of the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only It is an embodiment of a part of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention.

[0052] Such as Figure 10 , Figure 11 , Figure 12 , a test method for thin film packaging, comprising the steps of:

[0053] S1 is provided with two test units comprising a calcium sensor and a packaging film, respectively a cavity test unit in which the calcium sensor is not in contact with the packaging film and a stack test ...

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Abstract

A test method for thin-film packaging. The only variable is whether the calcium sensor and the packaging film are continuously formed into a film. A stacked test unit and a cavity test unit are set up. Through optical calcium testing, electrical calcium testing, and photoelectric collaborative testing methods, each The experimental group conducts quantitative analysis of water vapor infiltration, and obtains the water infiltration amount M d and the intrinsic water seepage M i and cavity test unit to measure the total water penetration M of the encapsulation film t ; analyze M d , M i and M t The relationship between the tested accurate water vapor transmission rate.

Description

technical field [0001] The invention relates to the field of thin-film optoelectronic devices, in particular to a testing method for thin-film packaging. Background technique [0002] With the change and innovation of science and technology, thin-film optoelectronic devices are an inevitable development trend. However, most of these new optoelectronic devices are water vapor-sensitive and require high-barrier thin films to protect the devices. Therefore, a series of high-performance packaging films and related testing methods have emerged, among which metal corrosion testing technology is a powerful testing method for water vapor barrier performance. [0003] The relatively simple process of metal corrosion testing, such as calcium testing, makes it the most commonly used evaluation method for water vapor permeation barrier performance in the scientific research community. Calcium metal is deposited on the substrate material in the form of a thin film by thermal evaporation...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N15/08
CPCG01N15/08G01N2015/0846G01N2015/086
Inventor 段羽王振宇
Owner JILIN UNIV
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