Starting method, device and system for magnetic levitation molecular pump
A start-up, molecular pump technology, applied in the components, machines/engines, pumps, etc. of the pumping device for elastic fluids, can solve the problems of poor suspension effect, etc., and achieve the effect of improving the suspension effect
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Embodiment 1
[0029] According to an embodiment of the present invention, an embodiment of a method for starting a magnetic levitation molecular pump is provided. It should be noted that the steps shown in the flow chart of the accompanying drawings can be executed in a computer system such as a set of computer-executable instructions, Also, although a logical order is shown in the flowcharts, in some cases the steps shown or described may be performed in an order different from that shown or described herein.
[0030] figure 1 A flow chart of a magnetic levitation molecular pump start-up method provided by an embodiment of the present invention, as shown in figure 1 As shown, the method includes the following steps:
[0031] Step S101, before starting the magnetic levitation molecular pump, setting the magnetic levitation molecular pump to the state to be detected;
[0032] Step S102, judging whether the maglev molecular pump in the state to be detected meets the start-up condition;
[...
Embodiment 2
[0046] The embodiment of the present invention provides a start-up device for a magnetic levitation molecular pump. The start-up device for a magnetic levitation molecular pump is mainly used to implement the start-up method for a magnetic levitation molecular pump provided in Embodiment 1. The following describes the magnetic levitation molecular pump provided in the embodiment of the present invention The pump start-up device will be introduced in detail.
[0047] image 3 It is a schematic structural diagram of a start-up device for a magnetic levitation molecular pump provided by an embodiment of the present invention. Such as image 3 As shown, the starting device of the magnetic levitation molecular pump mainly includes: a setting unit 11, a judgment unit 12 and a release control unit 13, wherein:
[0048] The setting unit 11 is used to set the magnetic levitation molecular pump to a state to be detected before the magnetic levitation molecular pump is started;
[004...
Embodiment 3
[0058] Figure 4 It is a schematic structural diagram of a magnetic levitation molecular pump start-up system provided by an embodiment of the present invention. Such as Figure 4 As shown, it includes: a magnetic levitation molecular pump 10 and a controller 20, wherein the magnetic levitation molecular pump 10 includes: a storage unit 101 and a sensor 102, the storage unit 101 is used to store the voltage or current of the magnetic levitation molecular pump 10, and the sensor 102 can refer to the radial axis For the sensor, the controller 20 includes: an ARM processor 201 connected to each other, a dual-port RAM memory 202 , a DSP controller 203 , and a control panel 204 .
[0059] The ARM processor 201 is used to set the magnetic levitation molecular pump 10 to a state to be detected before the start of the magnetic levitation molecular pump 10; the ARM processor 201 is also used to set the control panel 204 of the magnetic levitation molecular pump 10 to a locked state, a...
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