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Starting method, device and system for magnetic levitation molecular pump

A start-up, molecular pump technology, applied in the components, machines/engines, pumps, etc. of the pumping device for elastic fluids, can solve the problems of poor suspension effect, etc., and achieve the effect of improving the suspension effect

Inactive Publication Date: 2020-10-27
TIANJIN EMAGING TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a start-up method, device and system for a magnetic levitation molecular pump, so as to alleviate the technical problem in the prior art that the levitation effect of the magnetic levitation molecular pump is poor during use

Method used

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  • Starting method, device and system for magnetic levitation molecular pump
  • Starting method, device and system for magnetic levitation molecular pump
  • Starting method, device and system for magnetic levitation molecular pump

Examples

Experimental program
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Effect test

Embodiment 1

[0029] According to an embodiment of the present invention, an embodiment of a method for starting a magnetic levitation molecular pump is provided. It should be noted that the steps shown in the flow chart of the accompanying drawings can be executed in a computer system such as a set of computer-executable instructions, Also, although a logical order is shown in the flowcharts, in some cases the steps shown or described may be performed in an order different from that shown or described herein.

[0030] figure 1 A flow chart of a magnetic levitation molecular pump start-up method provided by an embodiment of the present invention, as shown in figure 1 As shown, the method includes the following steps:

[0031] Step S101, before starting the magnetic levitation molecular pump, setting the magnetic levitation molecular pump to the state to be detected;

[0032] Step S102, judging whether the maglev molecular pump in the state to be detected meets the start-up condition;

[...

Embodiment 2

[0046] The embodiment of the present invention provides a start-up device for a magnetic levitation molecular pump. The start-up device for a magnetic levitation molecular pump is mainly used to implement the start-up method for a magnetic levitation molecular pump provided in Embodiment 1. The following describes the magnetic levitation molecular pump provided in the embodiment of the present invention The pump start-up device will be introduced in detail.

[0047] image 3 It is a schematic structural diagram of a start-up device for a magnetic levitation molecular pump provided by an embodiment of the present invention. Such as image 3 As shown, the starting device of the magnetic levitation molecular pump mainly includes: a setting unit 11, a judgment unit 12 and a release control unit 13, wherein:

[0048] The setting unit 11 is used to set the magnetic levitation molecular pump to a state to be detected before the magnetic levitation molecular pump is started;

[004...

Embodiment 3

[0058] Figure 4 It is a schematic structural diagram of a magnetic levitation molecular pump start-up system provided by an embodiment of the present invention. Such as Figure 4 As shown, it includes: a magnetic levitation molecular pump 10 and a controller 20, wherein the magnetic levitation molecular pump 10 includes: a storage unit 101 and a sensor 102, the storage unit 101 is used to store the voltage or current of the magnetic levitation molecular pump 10, and the sensor 102 can refer to the radial axis For the sensor, the controller 20 includes: an ARM processor 201 connected to each other, a dual-port RAM memory 202 , a DSP controller 203 , and a control panel 204 .

[0059] The ARM processor 201 is used to set the magnetic levitation molecular pump 10 to a state to be detected before the start of the magnetic levitation molecular pump 10; the ARM processor 201 is also used to set the control panel 204 of the magnetic levitation molecular pump 10 to a locked state, a...

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Abstract

The invention provides a starting method, device and system for a magnetic levitation molecular pump and relates to the technical field of control of magnetic levitation molecular pumps. The startingmethod comprises the steps that before started, the magnetic levitation molecular pump is set to a to-be-detected state; then whether the magnetic levitation molecular pump under the to-be-detected state meets starting conditions is judged; and finally, the magnetic levitation molecular pump is controlled to be started under the circumstance that the starting conditions are met. Therefore, according to the starting method, device and system, the technical problem of a poor levitation effect can be avoided in the mode that whether the magnetic levitation molecular pump under the to-be-detectedstate meets the starting conditions is detected, and the magnetic levitation molecular pump is controlled to be started only when the starting conditions are met.

Description

technical field [0001] The invention relates to the technical field of magnetic levitation molecular pump control, in particular to a method, device and system for starting a magnetic levitation molecular pump. Background technique [0002] The existing magnetic levitation molecular pumps are generally suspended first, and then run. Even in the case of poor suspension state, the operation of the above molecular pump can be realized by operating the control panel, but its operation state is no longer suspension operation, but It is a mechanical bearing operation, which is easy to cause the loss of the parts of the molecular pump itself. In addition, the operator who controls the magnetic levitation molecular pump is not necessarily familiar with the magnetic levitation molecular pump, so there are situations such as violent docking that may easily lead to poor suspension of the molecular pump. [0003] To sum up, the prior art has the technical problem of poor levitation eff...

Claims

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Application Information

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IPC IPC(8): F04D19/04F04D27/00F04D29/00F04D29/058
CPCF04D19/048F04D27/001F04D27/008F04D29/002F04D29/058
Inventor 李鲁楠洪申平沙宏磊俞天野项海铭王文建赵明杨沈虹
Owner TIANJIN EMAGING TECH
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