Unlock instant, AI-driven research and patent intelligence for your innovation.

Workpiece side periphery imaging system

An imaging system and workpiece technology, applied in optical components, instruments, analysis materials, etc., can solve problems such as high cost, inability to image clearly, and complex systems

Pending Publication Date: 2020-10-30
BEIJING LEADERTECH INTELLIGENT EQUIP CORP
View PDF11 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] At present, when detecting defects on a cylindrical surface (such as the side circumference of a wafer-shaped workpiece), it is usually necessary to use multiple cameras to image the side circumference of the workpiece separately, which makes the system too complicated and expensive
Alternatively, use a super-telecentric lens to image the side circumference of the workpiece by means of a flat light source or a common ring light source, but this method cannot clearly image small defects on the side circumference of the workpiece, resulting in high leakage. detection probability

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Workpiece side periphery imaging system
  • Workpiece side periphery imaging system
  • Workpiece side periphery imaging system

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0046] Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete and will fully convey the concept of example embodiments to those skilled in the art. The described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.

[0047] Furthermore, the drawings are merely schematic illustrations of the present disclosure and are not necessarily drawn to scale. The same reference numerals in the drawings denote the same or similar parts, and thus repeated descriptions thereof will be omitted. Some of the block diagrams shown in the drawings are functional entities and do not necessarily correspond to physically or logically separate entities. These functional entities ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a workpiece side periphery imaging system, which comprises: a super-telecentric lens; a conical cup comprising an inner wall capable of reflecting light and a first opening, wherein the first opening faces the super-telecentric lens; and a luminous body arranged in the conical cup.

Description

technical field [0001] The present disclosure relates to the technical field of workpiece defect detection, and in particular to an imaging system for the side circumference of a workpiece. Background technique [0002] At present, when detecting defects on a cylindrical surface (such as the side circumference of a wafer-shaped workpiece), it is usually necessary to use multiple cameras to separately image the side circumference of the workpiece, which makes the system too complicated and expensive. Alternatively, use a super-telecentric lens to image the side circumference of the workpiece by means of a flat light source or a common ring light source, but this method cannot clearly image small defects on the side circumference of the workpiece, resulting in high leakage. Check probability. [0003] It should be noted that the information disclosed in the above background section is only for enhancing the understanding of the background of the present disclosure, and theref...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/952G01N21/88G02B13/22G03B15/06
CPCG01N21/952G01N21/8806G02B13/22G03B15/06G01N2021/8809
Inventor 崔忠伟陈鸣崔凯翔
Owner BEIJING LEADERTECH INTELLIGENT EQUIP CORP