Lens angle adjusting device and adjusting method and photoetching machine

Abstract

The invention discloses a lens angle adjusting device, and adjusting method and a photoetching machine, and belongs to the technical field of lens adjustment. The lens angle adjusting device comprisesa supporting plate, a mounting frame, a fixed pin shaft, a rotary pin shaft and a first jackscrew, wherein one end of the mounting frame is used for mounting a lens, and the other end is provided with a flange connected with the support plate; the fixed pin shaft and the rotary pin shaft are both used for connecting the flange and the supporting plate, the fixed pin shaft is tightly matched withthe flange, and the rotary pin shaft is loosely matched with the flange; the first jackscrew is installed on the flange and can abut against the rotating pin shaft in the circumferential direction. According to the lens angle adjusting method, adjustment is carried out by adjusting the lens angle adjusting device. The photoetching machine comprises the lens angle adjusting device. According to thelens angle adjusting device and adjusting method and the photoetching machine, the first jackscrew is rotated to push the rotary pin shaft and drive the flange to rotate around the fixed pin shaft, so the lens angle is adjusted, and the adjusting efficiency, the adjusting precision and the adjusting flexibility are improved.

Description

technical field [0001] The invention relates to the technical field of lens adjustment, in particular to a lens angle adjustment device, an adjustment method and a photolithography machine. Background technique [0002] A photolithography machine is a device that projects the pattern on the mask onto the surface of the workpiece through a projection lens. When scanning, the lens needs to accurately correspond to the surface of the workpiece, and the exposure lens angle requires good stability and high precision, generally requiring an accuracy of 0.001°. In the prior art, there are mainly the following three methods for adjusting the angle of the lens. First, the adjustment of the angle of the lens is achieved through an electronic control device, which is costly. Second, the adjustment is through a mechanical structure, but the structure is too complicated and the angle adjustment is not flexible enough. ; Third, rely on manual rotation, completely by feeling, without quan...

AI Technical Summary

Problems solved by technology

In the prior art, there are mainly the following three methods for adjusting the lens angle. First, the adjustment of the lens angle is achieved through an electronic control device, which is expensive; second, the adjustment is through a mechanical structure, but the structure is too complicated and the angle adjustment is not flexible enough. ; Third, rely on manual rotation, completely by feeling, without quantitative standards, time-consuming and labor-intensive, and the rotation accuracy is low

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