Chuck device in wafer cleaning equipment and wafer cleaning equipment

[0019] In order to make the objects, technical solutions and advantages of the present application, the technical solutions of the present application will be described in conjunction with the specific embodiments and corresponding drawings of the present application. Obviously, the described embodiments are merely part of embodiments of the present disclosure, rather than all embodiments. Based on the embodiments in the present application, one of ordinary skill in the art is in the scope of the present application without making creative labor premistence.

[0020] The term "first", "second", "second", or the like in the specification of the present application and the like are used to distinguish a similar object, and is not intended to describe a particular order or ahead order. It is to be understood that the data such as use can be interchanged in appropriate, so that the embodiments of the present application can be implemented in the order other than those illustrated or described herein. And the "first," "second," and the like are usually distinguished by a class of objects, not the number of objects defined, for example, the first object may be one or may be plural. In addition, the specification and the claim "and / or" represent at least one of the connected objects, characters "/", generally indicating that the front and rear association object is a "or" relationship.

[0021] DRAWINGS be described in detail by embodiments disclosed technical solution of the present embodiment each application specific embodiments and applications thereof scenario.

[0022] Please refer to Figure 1 to 4 The present application discloses an embodiment of the chuck device wafer cleaning apparatus for cleaning a wafer holding device member to be clamped, i.e. piece to be machined, the clamping member may generally be a wafer, as disclosed the apparatus includes a chuck comprising a chuck base (not shown), the transmission member 100, an elastic member 200, a plurality of clamping members 300 and a drive mechanism 400.

[0023] Wherein the base member is a base chuck chuck apparatus, the chuck base to provide a mounting base for the chuck device. Typically, chuck base has a hollow truncated cone. Structure and Function chuck base are known techniques for text brevity, are not repeated here.

[0024] A plurality of clamping members 300 disposed in the chuck base, and a plurality of clamping members form a holding space 300, the clamping member may be clamped to the clamping space, so as to achieve the purpose of the clamping member to be clamped. Drive member 100 is rotatably disposed in the chuck base, a case where a plurality of clamping members 300 and 100 are connected to the drive transmission member, the transmission member 100 rotates in the first rotational direction, the drive 100 may drive a plurality of clamping members the case member 300 to be clamped clamping member, of course, the drive member 100 is rotated in the direction opposite to the first rotational direction, a plurality of drive transmission member 100 can be clamped clamp member 300 is released, to be interposed in order to achieve hold grip and release members.

[0025] The resilient member 200 is connected to the transmission member 100, 200 and the elastic member 100 may be driven to rotate in the first rotational direction of the transmission member, in particular, the resilient member 200 is connected to the drive member 100 in a stretched state, the elastic member 200 on the drive member 100 rotational torque is applied, the direction and the rotational moment is the same as the first rotational direction, the drive member 100 is rotated in a first rotational direction at the turning torque effect. Typically the elastic member 200 may be a spring, since the spring has a simple structure and low cost advantages.

[0026] Embodiment, the resilient member 200 drives the transmission element 100 is rotated in the first rotational direction in the present application embodiment, the transmission member 100 so that the driving principle and be clamped clamping member 300 clamps are a plurality of known techniques, for text simplicity, not discussed here.

[0027] The drive mechanism 400 drives the chuck means can be switched between a first state and a second clamp holding state, in the case where the chuck means in a first retaining position, the resilient member 200 to the first drive transmission element 100 is rotated in the first rotational direction, so that the elastic member 200 is applied to a first rotational torque on the drive member 100; in the case of the chuck means in the second gripping state, the elastic member 200 to a second drive transmission member 100 in a first rotational direction, so that 200 pairs of second transmission element rotational torque is applied to the elastic member 100; wherein the second driving force greater than the first driving force, so that the second rotational torque greater than the first rotational torque, so that the card means holding the disc member to be clamped, the first and second rotational torque so that rotational torque transmission member 100 can be a different driving force holder 300 holding a plurality of members to be clamped, and further such that a plurality of clamping 300 treated differently clamping force of the clamping member. That is, the chuck means in the first state and the clamping force of the clamping treated in a second clamping member clamped state different.

[0028] The chuck apparatus disclosed herein, the resilient member 200 is connected to the transmission member 100, and the elastic member 200 can drive the drive member 100 is rotated in a first rotational direction to drive the plurality of drive member 100 is rotated in the first rotational direction holding member 300 holding member to be clamped, in order to achieve the purpose of the clamping member to be clamped, while the drive mechanism drives the chuck means 400 may be switched between a first state and a second clamp clamping state, a first elastic member 200 or the second driving force of a drive transmission member 100 rotates in the first rotational direction, so that the elastic member can be applied to the first and second rotational torque rotating torque 200 on the drive member 100, and a second a first rotational torque exceeds the rotational torque, the first and second rotational torque so that rotational torque transmission member 100 can be a different driving force holder 300 holding a plurality of members to be clamped, the clamping member 300 so that a plurality of treatment different clamping force of the clamping member, it is possible that the chuck apparatus disclosed in the present application have a variety of sizes different clamping forces to avoid the clamping force of the chuck device relatively fixed, only resulting in the clamping chuck means kind of material of the member to be clamped, thus making the apparatus versatile high chuck to the chuck means capable of clamping the clamping member to be more different materials, increase usage scenarios chuck device and ultimately improve the chuck product competitiveness devices.

[0029] In the case of an alternative embodiment, a first end of the elastic member 200 may be in the chuck means in a first state, and holding the transmission member 100 is hinged, and the second end 200 of the first end of the elastic member may be the distance between a first distance, such that a first drive transmission member 100 rotates in the first rotational direction; in the case of the chuck means in the second gripping state, the first end of the second end It may be the distance between the second distance, thereby driving the second driving force transmitting member 100 rotates in the first rotational direction, wherein the second distance is greater than the first distance.

[0030]In this case, in the case where the chuck means in a first retaining position, the distance between the first end and the second end of the resilient member 200 is a first distance, so that the elastic member 200 is applied on the drive member 100 a rotating torque; in the case of the chuck means in the second gripping state, a distance between the first end and the second end a second distance, so that 200 pairs of second transmission element rotational torque is applied to the elastic member 100; wherein , the second distance greater than the first distance, such that the second rotational torque greater than the first rotational torque, so that the chuck means to be clamped when the clamping member, the first and second rotational torque so that rotational torque transmission member 100 can be a plurality of different driving force holding member 300 holding member to be clamped, and further such that a plurality of clamping members 300 treated differently clamping force of the clamping member. Chuck device by means of such switching between a first state and a second clamp holding state is relatively simple, and the switching reliable, easy operation staff.

[0031] Incidentally, the first length in a first direction from a second distance less than the length in the first direction, the resilient member can be such that the second rotational torque applied to the drive member 200 pairs 100 is greater than the first rotational torque, the first a direction tangential to the first rotational direction.

[0032] As described above, the drive mechanism drives the chuck means 400 may be switched between a first state and a second clamp holding state, alternatively, the drive mechanism 400 may be driven a second end connected to the driving mechanism 400 may drive a second end movable between a first position and a second position. A drive mechanism capable of driving a second end 400 between a first position and a second position more accurately, so that more precise movement of the second end to the first or second position, at the same time, the present embodiment can avoid manual workers the second end of the drive movement to help protect the personal safety of staff and is conducive to automated operation chuck device, thus making automation chuck device higher.

[0033] Specifically, when the driving mechanism 400 is moved to a first position the second end, the distance between the first end and the second end may be a first distance, at this time, the chuck means in the first holding state; driving a second end of the drive mechanism 400 to a second position, the distance between the first end and the second end may be a second distance, at this time, the chuck means in the second gripping state. That is, in the case where the chuck means in a first retaining position, the second end in the first position, and the distance between the first end and the second end may be a first distance; chuck means is in the first case two clamping state, the second end in the second position, and the distance between the first end and the second end may be a second distance to achieve the resilient member 200 can be between the first and second distances the purpose switching.

[0034] In a specific operation, when the material of the clamping member to be softer, i.e. at a lower intensity until the clamping member, the second end of the switch 200 is moved to a first position of the elastic member, this time, the elastic member 200 a first rotating torque exerted on the drive member 100 is small, the chuck means to avoid bad clamp member to be clamped. When the material of the member to be clamped harder, i.e. higher strength when the member to be clamped, the switch spring second end 200 to a second position, at this time, the elastic member 100 is applied on the drive member 200 two large rotating torque to the clamping means so that the chuck member to be clamped, the clamping member to be prevented from falling off the chuck means.

[0035] In an alternative embodiment, the number of the elastic member 200 may be a plurality, the number of the drive mechanism 400 may be a plurality, the plurality of drive mechanisms 200 and a plurality of resilient members 400 may be provided one to one. In this case, a plurality of resilient members 200 can be such that the gripping means holding the chuck member, to be prevented from falling off the holder chuck means, thereby improving the stability of the chuck means for holding the member to be clamped. Meanwhile, compared to the chuck means is provided in only one elastic member 200 of the program, in the case where the same clamping force of the chuck apparatus, the chuck means in a plurality of resilient members 200 can be arranged such that the elongation of the elastic member 200 than small, since the elastic member 200 more easily to fatigue failure in the case of elongation is large, and therefore the chuck means in a plurality of resilient members 200 can be arranged such that a higher reliability of the elastic member 200, so that the reliability of the chuck means higher.

[0036] Further, a plurality of elastic members 200 may surround the axis of rotation of the drive member 100 is uniformly arranged, i.e., a plurality of elastic members 200 may be disposed in an annular array about the axis of rotation of the drive member 100, i.e., a plurality of resilient members 200 can be wound transmission member the axis of rotation 100 spaced from the other, so that a plurality of resilient members 200 pairs of rotating torque applied to the drive member 100 is more evenly distributed, preventing the rotational moment due to uneven distribution, resulting in a chuck member to be clamped, the clamping means the process of uneven clamping force, so that the chuck apparatus can be stably clamped member to be clamped.

[0037] Alternatively, the chuck apparatus may further include a synchronizer 500, a plurality of the drive mechanism 400 can be coupled to the synchronizer 500, the synchronizer 500 can be used to synchronize a plurality of drive mechanism 400 drives a plurality of the second end in the first position between the second position and movement. The synchronizer 500 can synchronize the second end such that the plurality of motion, while the second end of the plurality of synchronous movement of the clamping force of the chuck means as a variation can be easy for staff in the chuck clamping force of means to prevent multiple the second end is not synchronized movement causes a change in the clamping force of the chuck device irregularly, to facilitate rational selection of staff positions depending on the material of the second end of the member to be clamped, thereby making the chuck means controllable high.

[0038] Specifically, the synchronizer 500 may be rotatably arranged disk-shaped structure or a cyclic structure, a cyclic structure or a disc-like structure in the chuck base member, and the rotation axis of the disc-like structure or a cyclic structure member the axis of rotation of the drive member 100 may be collinear. Turntable simple structure and cyclic structure can be reduced structural complexity, and cyclic structures rotary member is provided to facilitate the chuck means, and a plurality of object can be reliably achieved while operating the drive mechanism 400.

[0039] In the embodiment of the present application, the type of drive mechanism 400 may have multiple, for example, electrical, hydraulic and pneumatic telescoping rod telescopic rod, etc., the present embodiment is not limited in application to this embodiment. In an alternative embodiment, the drive mechanism 400 may include a first link 410 and second link 420, the third and fourth end of the first link 410 and the second end is hinged to the first link 410 end and a second end of the fifth link 420 is hinged to the first link 410 is hinged to the base of the chuck, and the articulation point between the two ends of a third and a fourth end, the second link section 420 may be driven a connecting rod 410 rotates about the hinge point, to drive a second end movable between a first position and a second position. 400 The structure of such a simple structure of the driving mechanism, the driving reliable, easy setup.

[0040] Specifically, the second link 420 may be connected to an external driving module, the chuck clamped state switching device requires an external driving module connected to the second link 420, link 420 to drive the second movement, so that the second drive link 420 rotates the first link 410, the present embodiment can avoid driving module is provided (e.g., in the above motor, hydraulic and pneumatic telescoping rod telescopic rod, etc.) in the chuck means, and the drive module usually high cost, therefore, the present embodiment enables a lower cost of the chuck device.

[0041] In order to make a plurality of drive mechanism 400 can operate simultaneously, so that a second end of the plurality of synchronized movement, alternatively, the chuck apparatus may further include a synchronizer 500, a synchronizer 500 is rotatably disposed in the chuck base, and synchronization the axis of rotation is collinear with the axis of rotation 500 of the drive member 100, a plurality of the second end of the sixth link 420 are hinged to the synchronizer 500, synchronizer 500 may synchronize the plurality of second drive link 420, a plurality of when any one of a work driving mechanism 400, the drive mechanism 400 to drive the work synchronizer 500 is rotated, so that the rest of the synchronizer 500 drives the driving mechanism 400 is operated so that the plurality of drive mechanisms 400 can operate simultaneously, so that a plurality of two-terminal synchronous movement. Meanwhile, in the present embodiment, a drive mechanism of any of the plurality of drive mechanisms 400 and 400 is only connected to an external drive module, the drive mechanism 400 is required to prevent a plurality of the plurality of connected external driving module, thereby facilitating staff chuck control device.

[0042] In a specific operation, the external driving module 420 drives a second link motion, this time, only the second link 420 can be driven to rotate first link 410, the synchronizer 500 can be driven rotated, so that the remaining the second link 420 starts rotating, thereby achieving the purpose of the plurality of drive mechanisms 400 simultaneously. When a plurality of the second link 420 movement, a plurality of second link 420 rotatably drives a plurality of the first link 410 so that the plurality of first link 410 to drive a second end of the plurality of motion.

[0043] For convenience of explanation hereinafter, are set as follows: a third end and a second end of the hinge point as a first hinge point 610, a fourth terminal and the fifth terminal hinge point of the second hinge point 620, the first link 410 and the card the articulation point of the base plate 630 is a third hinge point, the hinge point of the first end of the transmission member 100 is a fourth hinge point 640, a sixth side 500 and the hinge point of the synchronizer 650 as a fifth hinge point, a second hinge 620 and the connecting point between the fifth hinge point 650 is a first connection, the connection between the first hinge point 610 and the fourth hinge point 640 to the second connection.

[0044] In particular the chuck means during operation of the chuck gripping means may take a long time to be the same kind of material of the clamping member, the chuck apparatus requires a long time to maintain the same clamping force, therefore, the second end 200 of the resilient member when a long time is required in the holding position, alternatively, the drive mechanism 400 may have a first stable state and a second stable state, the second end of the driving mechanism 400 drives the movement to the first position, the drive mechanism 400 is in the first stable state , a second hinge point 620, a third hinge point 630, a first hinge point 610 and the fourth hinge point 640 may be sequentially arranged collinearly, i.e., in the case where the second end in the first position, the drive mechanism 400 in the first steady state, and the chuck means is in the first holding state, this time, in the absence of external force, the drive mechanism 400 can be maintained for a long time at the first steady state.

[0045] When the second end 400 to a second driving position of the drive mechanism, the drive mechanism 400 is in the second steady state, where the straight line connecting the first rotational center may be synchronized through 500, and the first and the second connecting wirings intersecting , that is to say, in the case where the second end in the second position, the drive mechanism 400 is in the second steady state, and the chuck means in the second gripping state, at this time, the second drive mechanism is in a steady state mechanical analysis found 400, the torque of the first link 410 and second link 420 is restricted by the rod length is applied to the elastic member 200, in the absence of external force, the drive mechanism 400 can be maintained for a long time in this The second steady state.

[0046] Seen by the above, the drive mechanism 400 having a first stable state and a second stable state, so that the second end of the elastic member 200 can be held at a certain position for a long time, thereby making the chuck means capable of holding the same time clamping force , so that the chuck means can be of the same material holding member holder for a long time.

[0047] In order to change the elastic force of the elastic member 200 at the second end of the motion amount is large, i.e. the difference between the first distance and the second distance is large, alternatively, the third hinge point 630 and the point 610 of the first hinge the distance between the third distance may be a distance between the third hinge point 630 and a second hinge point 620 may be a fourth distance, the third distance may be greater than the fourth distance such that the second end of the large displacement motion, and Since the elastic force of the elastic member 200 a positive correlation with the stretching distance, therefore, the second end of the displacement motion is large, the amount of change in the elastic force of the elastic member 200 is also relatively large, it is possible that the clamping force means a larger range of the chuck and further such that the chuck apparatus capable of clamping a large difference strength material member to be clamped, to further increase the versatility of the chuck device.

[0048]As described above, the plurality of clamps 300 are disposed on the chuck base, and the plurality of clamps 300 form a clamping space, and the tube can be clamped in the clamping space, specifically, the transmission member 100 can be The drive gear, the clamp 300 can include a rotating gear and an eccentric wheel that rotatably disposed on the chuck base, and is engaged with the drive gear, the eccentric wheel is provided in the rotation gear, the transmission gear drives the rotation gear rotation, and rotates The gear drives the eccentric wheel to hold the holder. In this case, the transmission member 100 drives the eccentric wheel to rotate, and when the eccentric wheel is rotated, the clamping space can become large, so that the clamping and release of the tube to be pinned. Such a structural clamp 300 is simple to simplify the structure of the chuck device to reduce the structure of the chuck device, and the structural clamp 300 can reliably clamp the tolerant holder.

[0049] Based on the chuck apparatus disclosed in the present application embodiment, the present application example also discloses a wafer cleaning apparatus, and the disclosed wafer cleaning apparatus includes a chuck apparatus according to any embodiment above.

[0050] Specifically, the wafer cleaning apparatus can be used to clean the wafer, so that the wafer cleaning apparatus can be cleaned without replacing the chuck device, the wafer can be cleaned, prevent wafer cleaning equipment from replacing the chuck without replacement In the case of a device, only the wafer of a material can be cleaned. When a plurality of different materials are cleaned, the wafer cleaning device does not need to stop the chuck device, thereby preventing the wafer cleaning device from replacing the chuck device. The cleaning efficiency of the wafer cleaning apparatus is low, thereby increasing the cleaning efficiency of the wafer cleaning apparatus to make the wafer cleaning equipment have higher capacity.

[0051] In the embodiment of the present application, the various embodiments are different, and different optimization features between the various embodiments may be combined to form a better embodiment, and the text is simple, it No longer.

[0052] It is not intended to limit the present application as described above. For those skilled in the art, the present application can have various changes and changes. Any modification, equivalent replacement, improvement, etc. according to the spirit and principles of the present application, should be included within the scope of the claims.