Micro-scale force sensor based on high-frequency flutter of piezoelectric cantilever beam and measuring method thereof

Abstract

The invention provides a micro-scale force sensor based on high-frequency flutter of a piezoelectric cantilever beam. The micro-scale force sensor comprises a piezoelectric sensing layer, a structurallayer, a piezoelectric driving layer and a base, wherein the piezoelectric sensing layer, the structural layer and the piezoelectric driving layer are all of rectangular beam structures and are sequentially bonded with one another to form a piezoelectric cantilever beam; the end part of the piezoelectric cantilever beam is connected with the base; the polarization directions of the piezoelectricsensing layer and the piezoelectric driving layer are opposite; the structural layer is grounded. The invention further provides a measuring method of the micro-scale force sensor based on high-frequency flutter of the piezoelectric cantilever beam. According to the method, the influence of charge leakage on the static micro-scale force detection precision can be inhibited, the robust micro-scaleforce detection with high resolution and high response speed is realized, and the method is suitable for being applied to force sensing in the fields of precision positioning, micro-nano operation andthe like. Meanwhile, high-frequency flutter of the sensor can effectively reduce interference of viscous force between a micro-scale object and the end effector on micro-nano operation, and the efficiency of the micro-nano operation is improved.

Description

technical field [0001] The invention relates to a piezoelectric micro-scale force sensor, more specifically, to a micro-scale force sensor based on a piezoelectric cantilever beam high-frequency flutter and a measurement method thereof. Background technique [0002] Piezoelectric material is a kind of intelligent material that can realize mutual conversion of mechanical energy and electrical energy. Piezoelectric materials have direct piezoelectric effect and inverse piezoelectric effect. Among them, the positive piezoelectric effect refers to that when a piezoelectric material is deformed by an external force in a certain direction, a polarization phenomenon will occur inside it, and at the same time, a phenomenon of positive and negative opposite charges will appear on its two opposite surfaces, which can realize the transfer of mechanical energy to electrical energy. The conversion is mainly used to design sensors; the inverse piezoelectric effect refers to the phenomeno...

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Problems solved by technology

[0004] Existing piezoelectric microscale force sensors (including piezoelectric cantilever beam microscale force sensors) only use the positive piezoelectric effect. Due to the phenomenon of charge leakage in piezoelectric materials, it is difficult for the sensor to obtain stable and accurate static microscale force measurements.

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