A high reliability iptv set-top box
A reliability, set-top box technology, applied in selective content distribution, cooling/ventilation/heating transformation, modification through conduction heat transfer, etc., can solve problems such as poor heat dissipation, improve heat dissipation performance, low cost, and solve poor heat dissipation Effect
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[0052] Provide a semiconductor substrate 1, the material may be a silicon material, a silicon germanium material, a silicon-on-insulator (SOI) material, or a silicon carbide material;
[0053] A first hard mask layer 2 is formed on the upper surface of the semiconductor substrate 1, a photoresist layer (not shown) is formed above the first hard mask layer 2, and a photoresist layer (not shown) is formed on the first hard mask layer 2 through photolithography and etching processes. forming a first opening;
[0054] performing an anisotropic etching process on the semiconductor substrate 1 in the first opening to form first diamond-shaped cavities T1-T6;
[0055] A first protection layer (not shown) is formed on the inner surface of the first diamond-shaped cavity T1-T6, and the material of the protection layer can be silicon oxide formed by thermal oxidation process or silicon nitride formed by deposition, silicon oxynitride or a combination of the above materials ;
[0056] ...
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