Detection tool for displacement sensor of magnetic suspension molecular pump

A displacement sensor and detection tooling technology, applied in measuring devices, instruments, etc., can solve problems such as inability to measure axial and radial sensors

Pending Publication Date: 2020-11-10
北京中科九微科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Therefore, the technical problem to be solved by the present invention is to overcome the defect that a detection tool in the prior art cannot measure both axial and radial sensors, thereby providing a detection tool for a magnetic levitation molecular pump displacement sensor

Method used

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  • Detection tool for displacement sensor of magnetic suspension molecular pump
  • Detection tool for displacement sensor of magnetic suspension molecular pump
  • Detection tool for displacement sensor of magnetic suspension molecular pump

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Embodiment Construction

[0043] The technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0044] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, ...

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Abstract

The invention provides a detection tool for a displacement sensor of a magnetic suspension molecular pump, and belongs to the technical field of detection equipment, and the detection tool comprises:an XYZ mobile platform which is installed on a bottom plate; a test piece fixing frame which is connected to the XYZ moving platform and is provided with an extending end used for being connected witha test piece and a connecting rod detachably and vertically connected to the extending end; a test piece which is connected to the bottom end of the connecting rod, wherein the test piece is providedwith a bottom plane and an arc-shaped side wall surface, or the test piece comprises a first test piece and a second test piece, the first test piece is provided with a bottom plane, and the second test piece is provided with a side wall arc-shaped surface. The detection tool for the displacement sensor of the magnetic suspension molecular pump is simple in structure, accurate in measurement andcapable of being repeatedly used, and under the same tool, measurement of different sensors can be achieved only by replacing the test piece.

Description

technical field [0001] The invention relates to the technical field of detection equipment, in particular to a detection tool for a displacement sensor of a magnetic levitation molecular pump. Background technique [0002] The displacement sensor is a linear device that belongs to metal induction. The function of the sensor is to convert various measured physical quantities into electricity. When measuring the distance, the actual measured output data of the displacement sensor is directly used. However, as the use time increases, the accuracy of the displacement sensor decreases, resulting in the disadvantages of low precision and poor repeatability of the displacement sensor. Calibration devices are usually used for calibration. [0003] In the process of measurement, it is all for the measurement of a single probe, connected to the test piece through a micrometer, and the calibration of the displacement sensor is realized by comparing the data displayed by the displacemen...

Claims

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Application Information

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IPC IPC(8): G01B21/02
CPCG01B21/02
Inventor 陈林刘强张亮任世瑜
Owner 北京中科九微科技有限公司
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