Staggered-layer supporting structure of piezoelectric micropump and gas control device

A supporting structure and control device technology, applied to parts, pumps, and pump elements of elastic fluid pumping devices, can solve problems such as increasing the volume of piezoelectric pumps, and achieve miniaturization and shrinkage of the circumference effect of size

Pending Publication Date: 2020-11-24
常州威图流体科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to solve the problem that the piezoelectric micropump in the prior art needs to be connected to the peripheral supporting part through the connecting part extending in the circumferential direction, and the supporting part is fixed by lamination, which greatly increases the volume of the piezoelectric pump. Problem, the present invention provides a staggered support structure and gas control device for a piezoelectric micropump

Method used

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  • Staggered-layer supporting structure of piezoelectric micropump and gas control device
  • Staggered-layer supporting structure of piezoelectric micropump and gas control device
  • Staggered-layer supporting structure of piezoelectric micropump and gas control device

Examples

Experimental program
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Effect test

Embodiment 1

[0067] like Figure 1-23 As shown, the present embodiment provides a staggered support structure of a piezoelectric micropump, including a piezoelectric micropump and a support plate 4, one side of the piezoelectric micropump is connected to the support plate 4, and the piezoelectric micropump and the support plate The gap between 4 forms an air intake cavity 6, and the support plate 4 supports and constrains the piezoelectric micropump from below the piezoelectric micropump. It avoids the disadvantage that the piezoelectric micropump in the prior art is connected to the peripheral supporting part through the connecting part extending in the circumferential direction, and the supporting part is laminated and fixed, which increases the circumferential volume of the piezoelectric micropump.

[0068] The piezoelectric micropump includes a resonance plate 1, a piezoelectric vibrator 2, and an electrode assembly 3. The piezoelectric vibrator 2 includes a vibration plate 21 and a pi...

Embodiment 2

[0086] like Figure 24-27 As shown, this embodiment is basically the same as the first embodiment, the difference is that the protrusion 11 is not directly connected to the supporting plate 4 , but is supported by the supporting plate 4 through the connecting plate 9 .

[0087] In this embodiment, the connection plate 9 is connected to the support plate 4, and the protrusion 11 is connected to the connection plate 9. There is a gap between the connection plate 9 and the support plate 4 to form an air intake transition cavity 42. The connection plate 9 and the resonance plate 1 Together with the protrusion 11, the intake cavity 6 is formed. Specifically, the outer periphery of the supporting plate 4 protrudes to form a concave portion, and the connecting plate 9 is in sealing connection with the outer peripheral protrusion of the supporting plate 4 , so that an air intake transition chamber 42 can be formed between the connecting plate 9 and the supporting plate 4 .

[0088] I...

Embodiment 3

[0095] like Figure 28 As shown, the present embodiment is basically the same as the second embodiment, the difference is that no protrusion is provided on the outer periphery of the supporting plate 4, the connecting plate 9 is connected with the supporting plate 4, and a third protrusion is formed between the connecting plate 9 and the supporting plate 4 43, the third protrusion 43 is annular, the third protrusion 43 can be integrally formed with the support plate 4, and can also be integrally formed with the connecting plate 9, or the third protrusion 43 is set independently, and its two surfaces are respectively connected with the The connection plate 9 is connected to the support plate 4 . In the gas control device, the connection plate 9 can be completely accommodated in the cavity surrounded by the support plate 4 and the housing 7, so that the circumferential dimension of the connection plate 9 can be reduced.

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Abstract

The invention belongs to the technical field of fluid conveying equipment, and particularly relates to a staggered-layer supporting structure of a piezoelectric micropump and a gas control device. Thestaggered-layer supporting structure of the piezoelectric micropump comprises the piezoelectric micropump and a supporting plate, wherein the piezoelectric micropump comprises a resonance plate, a piezoelectric vibrator and an electrode assembly, the resonance plate and the piezoelectric vibrator are sequentially arranged in a stacked mode, and the electrode assembly is connected to the side, away from the resonance plate, of the piezoelectric vibrator; and the side, away from the piezoelectric vibrator, of the resonance plate is supported by the supporting plate, a gap is formed between theresonance plate and the supporting plate so as to form a gas inlet cavity, and the supporting plate is used for supporting and restraining the piezoelectric micropump. The gas control device comprisesthe staggered-layer supporting structure of the piezoelectric micropump and a shell. The technical problems that in the prior art, a piezoelectric micropump needs to be connected to a peripheral supporting part through a connecting part extending in the circumferential direction, the supporting part is laminated and fixed, and the size of the piezoelectric pump is greatly increased are solved.

Description

technical field [0001] The invention belongs to the technical field of fluid conveying equipment, and in particular relates to a staggered support structure and a gas control device of a piezoelectric micropump. Background technique [0002] Microfluidic pumps have a wide range of application requirements in the fields of medicine and biology, fine chemicals, aerospace, and micro-electromechanical systems. Today's electronic products with application goals usually have a trend of miniaturization, which also requires microfluid pumps to be more miniaturized while ensuring their output capacity (output pressure and output flow) or to improve their performance without being oversized. output capacity. [0003] Current gas micropumps mainly include electromagnetic diaphragm pumps driven by motor cam mechanisms, piezoelectric diaphragm pumps driven by piezoelectric vibrators, and micropumps using squeeze film effects. A piezoelectric diaphragm pump is a diaphragm pump that appl...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B43/04F04B53/00
CPCF04B43/046F04B53/00
Inventor 不公告发明人
Owner 常州威图流体科技有限公司
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