High precision and high temporal and spatial resolution three-dimensional measurement method, system, medium and application

Abstract

The invention belongs to the technical field of plasma monitoring and analysis, and discloses a three-dimensional measurement method, system, medium and application with high precision and high temporal and spatial resolution, using an electrostatic probe with high precision and high temporal and spatial resolution and a far-infrared laser interferometer as a benchmark , through innovative design, the corresponding relationship model between plasma electron density and light intensity and the corresponding relationship model between electron density space-time distribution and light intensity space-time distribution are established, so as to realize high-precision high-speed high-speed optical imaging system high-precision high-time-space resolution plasma non-contact diagnosis. The invention can realize the decoupling of electron density and electron temperature measurement by using various optical filters. Under the conditions of low to high pressure and different ionization rates, it is necessary to consider the relationship between light intensity, air pressure conditions and ionization rate conditions, and improve the calibration coefficient and decoupling characteristics under different conditions to improve measurement accuracy. The invention realizes high time resolution, high spatial resolution and high precision diagnosis of high speed target plasma.

Description

technical field [0001] The invention belongs to the technical field of plasma monitoring and analysis, and in particular relates to a three-dimensional measurement method, system, medium and application with high precision and high temporal and spatial resolution. Background technique [0002] At present, the physical and chemical processes in the plasma are basically monitored and analyzed by optical, magnetic and electrical means. Commonly used diagnostic methods include Langmuir probe method, microwave interferometry, far-infrared laser interferometry, spectroscopy and High-speed imaging diagnostics, etc. The Langmuir probe is a contact diagnostic method, which has the advantage of a relatively high spatial resolution of hundreds of microns. However, the diagnostic accuracy is affected by the interference of the surrounding environment on the current collected by the probe, and the diagnostic model needs to be studied. When the probe is working, it will affect the elect...

AI Technical Summary

Problems solved by technology

It is required that the far-infrared laser interferometry system needs to meet the indicators of 2 microseconds, 5 millimeters and accuracy of 10%, the electrostatic probe should meet the requirements of spatial resolution of 5mm, and the requirements of optical three-dimensional diagnosis should meet the requirements of 1 microsecond, 5 millimeters and the reconstruction error of light intensity should be less than 5%. The above-mentioned indicators are very challenging and advanced for a single diagnostic method. Only when a single diagnostic method meets the requirements of the indicators can the overall indicator requirements be achieved.

[0008] The significance of solving the above problems and defects is: the diagnostic system requires the far-infrared laser interference system to meet the indicators of 2 microseconds, 5 millimeters and 10% accuracy, the electrostatic probe meets the requirements of spatial resolution of 5 mm, and the optical three-dimensional diagnosis requires 1 microsecond , 5 mm, and light intensity reconstruction error less than 5%. The above indicators are very challenging and advanced for a single diagnostic method. Only when a single diagnostic method meets the requirements of the indicators can the overall indicator requirements be achieved.

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