Cleaning device for integrated circuit processing
A technology for cleaning devices and integrated circuits, which is applied to the cleaning method using liquid, the cleaning/polishing of conductive patterns, the cleaning method using gas flow, etc. Protects, prevents contamination, improves cleaning effectiveness
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[0028] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0029] see Figure 1-6 , the present invention provides a technical solution: a cleaning device for integrated circuit processing, such as figure 1 , figure 2 , image 3 with Figure 5As shown, the support mechanism 1 includes a base 101, a support plate 102, a top plate 103, a universal self-locking wheel 104, a ball 105, a motor 106, a horizontal plate 107, a movable plate 108 and screws 109, and the base 101 is connected to the top plate by the support ...
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