Microphone and control circuit for the microphone
A microphone and circuit technology, applied to circuits, electrical components, electrostatic sensors, etc., can solve problems such as large signal loss and low signal-to-noise ratio
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[0076]Performance losses in microelectromechanical systems (MEMS) microphones are due to viscous losses in the backplane of the MEMS device. The detrimental effect of viscous losses on microphone performance increases with decreasing microphone size. Backplane viscous losses can be significantly reduced by encapsulating MEMS devices under low pressure or ideal vacuum conditions. However, packaging under low pressure or vacuum conditions makes the MEMS device more responsive to changes in atmospheric pressure, which can create noise in the acoustic signals and / or data sensed by the MEMS device. The atmospheric pressure at sea level is 100kPa, which is about 3 orders of magnitude higher than the dynamic range of sound pressure (200Pa). The present disclosure relates to counteracting measurement fluctuations in atmospheric pressure by generating counteracting electrostatic forces.
[0077] The present disclosure provides a dielectric comb for use with MEMS transducers. The die...
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