An ultra-clean proportional valve

Abstract

The invention provides an ultra-clean proportional valve, which has an ultra-clean flow chamber, and a magnetic drive assembly is arranged through the cooperation of an embedded permanent magnet and an external control permanent magnet, and the opening and closing of the valve port is realized by using the principle of minimum magnetic resistance, and the position of the valve port can be adjusted. Accurate control is achieved; the magnetic drive assembly of the present invention has a small actuating distance, shortens the opening and closing time of the valve port, and has a fast response speed; it can apply driving forces in two directions to the valve core, avoiding the problem of relying on fluid impact force to open the valve core. The problem of poor reliability; the magnetic induction lines of the magnetic field form a closed loop, which has little interference to the outer space of the magnetic field, and also avoids the influence of magnets in the environment on the present invention.

Description

technical field [0001] The invention relates to the technical field of valves, in particular to a proportional valve suitable for ultra-clean occasions. Background technique [0002] Semiconductor, biomedicine, electronic grade chemical industry and other fields are very sensitive to particulate matter and other pollutants, and put forward very high cleanliness requirements for liquids or gases required for production processes. Materials or processes that meet certain cleanliness standards are called ultra-clean materials or ultra-clean process. In the field that requires ultra-clean fluid or corrosive fluid transmission and control, it is required that the valve must strictly prevent the internal medium from communicating with the outside world, be safe, reliable and corrosion-resistant, and at the same time, the valve itself must not produce wear and particles during the opening and closing process. However, traditional valves are usually equipped with external control p...

AI Technical Summary

Problems solved by technology

But this invention also has disadvantages: it is mainly an on-off valve, and it is difficult to accurately control the position of the valve core; when switching the opening and closing of the valve port, the external control permanent magnet needs to move a long distance, which is not conducive to quick action; the permanent magnet of the valve core and the external The magnetic pole position of the control permanent magnet is fixed, and the two can only attract or repel each other, and cannot play a driving role in the opening and closing of the spool, and the reliability of the spool opening and closing is not good; the magnetic field of the external control permanent magnet Diverge to the outer space of the valve body, may attract ferromagnetic objects in the environment, or interfere with the work of other devices

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