Ultra-clean proportional valve

Abstract

The invention provides an ultra-clean proportional valve. The ultra-clean proportional valve is provided with an ultra-clean flow chamber, a magnetic driving assembly is arranged in the mode that an embedded permanent magnet and an external control permanent magnet are matched, a valve port is opened and closed based on the minimum magnetic resistance principle, and the position of the valve portcan be precisely controlled; the actuating distance of the magnetic driving assembly is small, the opening and closing time of the valve port is shortened, and the response speed is high; driving force in two directions can be applied to a valve element, and the problem that the reliability is poor when the valve element is opened depending on fluid impact force is solved; and magnetic induction lines of the magnetic field form a closed loop, the interference in the external space of the magnetic field is small, and the influence of magnets in the environment on the valve is avoided.

Description

technical field [0001] The invention relates to the technical field of valves, in particular to a proportional valve suitable for ultra-clean occasions. Background technique [0002] Semiconductor, biomedicine, electronic grade chemical industry and other fields are very sensitive to particulate matter and other pollutants, and put forward very high cleanliness requirements for liquids or gases required for production processes. Materials or processes that meet certain cleanliness standards are called ultra-clean materials or ultra-clean process. In the field that requires ultra-clean fluid or corrosive fluid transmission and control, it is required that the valve must strictly prevent the internal medium from communicating with the outside world, be safe, reliable and corrosion-resistant, and at the same time, the valve itself must not produce wear and particles during the opening and closing process. However, traditional valves are usually equipped with external control p...

AI Technical Summary

Problems solved by technology

But this invention also has disadvantages: it is mainly an on-off valve, and it is difficult to accurately control the position of the valve core; when switching the opening and closing of the valve port, the external control permanent magnet needs to move a long distance, which is not conducive to quick action; the permanent magnet of the valve core and the external The magnetic pole position of the control permanent magnet is fixed, and the two can only attract or repel each other, and cannot play a driving role in the opening and closing of the spool, and the reliability of the spool opening and closing is not good; the magnetic field of the external control permanent magnet Diverge to the outer space of the valve body, may attract ferromagnetic objects in the environment, or interfere with the work of other devices

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