Multi-functional vertical zero-position overlapping scanning interferometry device
A technology of scanning interference and measuring devices, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of increased measurement and alignment difficulty caused by deflection mirrors, which is not conducive to ensuring the accuracy and stability of large mirrors, and the optical path is not flexible enough. , to achieve the effect of saving design and manufacturing time and economic cost, improving the range and detection accuracy, and improving detection efficiency
Active Publication Date: 2022-06-21
NAT UNIV OF DEFENSE TECH
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Problems solved by technology
The main disadvantage of this device is that the deflection mirror increases the difficulty of measurement alignment and introduces measurement errors; the optical path is not flexible enough, and limited by the structure, it is only suitable for a small range of aspheric mirrors; in addition, the measured aspheric mirror participates in multiple Motion adjustment, which is not conducive to ensuring the accuracy and stability of large mirror measurements
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[0032] The present invention will be further described in detail below with reference to the accompanying drawings.
[0033] like figure 1 As shown, the multifunctional vertical zero-position overlapping scanning interferometric measuring device in this embodiment includes a main control unit 6, a drive control circuit 7 and an air-floating vibration isolation base 8, and the air-floating vibration isolation base 8 is respectively provided with uprights 9 and used for placing DUT (see figure 1 The four-dimensional motion adjustment platform 5 of the reference number 4) in the column 9 is provided with a vertical lifting shaft 91 and the vertical lifting shaft 91 is equipped with a laser wavefront interferometer 2, and the light output path of the laser wavefront interferometer 2 is provided with a removable The CGH five-dimensional motion combined adjustment platform 3 of the holographic CGH component, the CGH five-dimensional motion combined adjustment platform 3 is located ...
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The invention discloses a multifunctional vertical zero-position overlapping scanning interference measurement device, which includes a main control unit, a drive control circuit and an air-floating vibration-isolation base. There is a vertical lifting axis and a laser wave surface interferometer is installed on the vertical lifting axis. The optical output path of the laser wave surface interferometer is equipped with a detachable CGH five-dimensional motion combination adjustment platform. The CGH five-dimensional motion combination adjustment platform is located on the four-dimensional motion adjustment platform. Directly above, the control ends of the CGH five-dimensional motion combined adjustment platform and the four-dimensional motion adjustment platform are connected to the main control unit through the drive control circuit, and the control end of the laser wave surface interferometer is connected to the main control unit. The invention can realize high-precision and high-efficiency measurement of large-diameter planes, spherical surfaces, and convex aspheric surfaces, and can flexibly perform zero-position measurement on planes, spherical surfaces, and aspheric surfaces. Combined with automatic control, the high-efficiency and high-efficiency measurement of large-diameter optical surfaces can be realized. Accuracy detection.
Description
technical field [0001] The invention belongs to the field of interferometric splicing measurement, in particular to a multifunctional vertical zero-position overlapping scanning interferometric measuring device, which is suitable for multi-functional vertical zero-position overlapping scanning interferometric measurement of large-diameter planes, spherical surfaces and convex aspheric surfaces. Background technique [0002] Due to the prominent role of the aspherical mirror in simplifying the structure of the optoelectronic information acquisition system and reducing the quality of the system, the aspherical optical system is widely used in civil and military optoelectronic instruments. Large-diameter convex aspheric mirrors play an irreplaceable role as secondary mirrors in space and ground-based telescope systems. With the large-scale application of aspherical mirrors, the aperture and relative aperture are getting larger and larger, and the measurement problem of optical ...
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IPC IPC(8): G01B11/30G01B9/02055
CPCG01B11/30G01B9/02055
Inventor 陈善勇铁贵鹏陈威威戴一帆薛帅翟德德刘俊峰
Owner NAT UNIV OF DEFENSE TECH