An on-chip thermal regulation system and its control method

Abstract

The invention discloses an on-chip thermal adjustment system and a control method thereof, comprising: an electric chip, an optical chip and a switch tube; the optical chip includes a thermal adjustment device located on one side of the optical device to be heated, and the thermal adjustment device includes a PN junction or PIN junction; one end of the switch tube is connected to the electric chip, and the other end is connected to the thermal adjustment device of the optical chip; the electric chip is used to generate PWM waves and send them to the switch tube; the switch tube is used to gate the the thermal regulation device in the optical chip, and send the PWM wave to the gated thermal regulation device in the optical chip; the gated thermal regulation device in the optical chip works in a forward-biased state under the action of the PWM wave to The high-frequency components in the PWM wave are filtered out, thereby generating stable thermal power to heat the optical device to be heated. Since the high-frequency cut-off frequency of the heat-regulating device is low, the driving frequency of the PWM wave is lower than that of the traditional PWM wave driving scheme, so the dynamic power consumption of the electric chip in the present invention is low, and the energy utilization efficiency is high.

Description

technical field [0001] The invention belongs to the field of semiconductor optical chip temperature control, and more specifically relates to an on-chip thermal adjustment system and a control method thereof. Background technique [0002] With the development of the information society, data traffic in application scenarios such as data centers and short-distance clusters is increasing rapidly every year. In order to meet traffic demands, high-speed, low-power, and low-cost integrated optical chips have been rapidly developed and widely used. Since on-chip optical devices are extremely sensitive to operating temperature and manufacturing process errors, thermal regulation is needed to adjust operating temperature and compensate manufacturing errors. Therefore, it is of great significance to study an on-chip thermal regulation system and its control method. [0003] Traditional on-chip thermal devices use a dedicated metal layer or a resistance composed of a doped semiconduc...

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Problems solved by technology

[0005] In view of the above defects or improvement needs of the prior art, the present invention provides an on-chip thermal adjustment and driving method, which aims to solve the technical problem of low energy utilization efficiency in the prior art

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