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A silicon wafer cleaning device for integrated circuit production

A silicon wafer cleaning and integrated circuit technology, which is applied in the manufacture of circuits, electrical components, semiconductors/solid-state devices, etc., can solve the problems of inconvenient access to silicon wafers and the inability to store a large number of silicon wafers, and achieve easy access and storage The effect of a large number

Active Publication Date: 2021-05-11
JIANGSU ASIA ELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] Therefore, the technical problem to be solved by the present invention is that the existing silicon wafer cleaning device cannot conveniently take silicon wafers and cannot store a large amount of silicon wafers

Method used

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  • A silicon wafer cleaning device for integrated circuit production
  • A silicon wafer cleaning device for integrated circuit production
  • A silicon wafer cleaning device for integrated circuit production

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041] refer to Figure 1~5 , the present embodiment provides a silicon wafer cleaning device for integrated circuit production, including a storage assembly 100 and a connection assembly 200, wherein the storage assembly 100 includes a side fence 101 and a handle 102, and the handle 102 is arranged at both ends of the top of the side fence 101 The side fence 101 is composed of a plurality of circular pipe rings 101a arranged in parallel, a first vertical bar 101b vertically arranged to connect each circular pipe ring 101a, a bottom net 101c connected to the bottommost side round pipe ring 101a, and a bottom net 101c arranged on the bottom net 101c. The placement plate 101d on the composition;

[0042] The connecting assembly 200 includes a first engaging part 201 and a second engaging part 202 , and the first engaging part 201 and the second engaging part 202 engage with each other to connect the handle 102 and the extension handle 300 .

[0043] The silicon wafer cleaning d...

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PUM

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Abstract

The invention discloses a silicon wafer cleaning device for integrated circuit production, which includes a storage component and a connection component, wherein the storage component includes side fences and handles, the handles are arranged at both ends of the top of the side fence, and the side fence It is composed of a plurality of circular pipe rings arranged in parallel, a first vertical rod connected vertically to each circular pipe ring, a bottom net connected with the bottommost round pipe ring and a placement plate arranged on the bottom net; the connection assembly includes The first embracing part and the second embracing part, the first embracing part and the second embracing part are engaged with each other to connect the handle and the extended handle; the present invention is convenient for placing the silicon chip in the liquid medicine tank, and can store a large number , for easy access.

Description

technical field [0001] The invention relates to the technical field of silicon wafer cleaning, in particular to a silicon wafer cleaning device used in the production of integrated circuits. Background technique [0002] Crystalline silicon integrated circuit boards still occupy an important position in the photovoltaic market at this stage, and the processing quality of silicon wafers will directly affect subsequent applications. At present, a large amount of impurities such as silicon powder, organic matter, and metal ions will remain on the surface of silicon wafers cut by diamond wire. If they are not cleaned in the cleaning process, it will have a great negative impact on the subsequent manufacturing process, resulting in a significant reduction in life. Therefore, the circuit board performance of the silicon wafer is particularly important. [0003] The existing silicon wafer cleaning process mainly includes steps such as pre-cleaning, chemical cleaning, rinsing, and ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67
CPCH01L21/67057
Inventor 钱诚李涛朱震
Owner JIANGSU ASIA ELECTRONICS TECH CO LTD