Self-sealing vacuum detection system and vacuumizing leakage detection method

Abstract

The invention discloses a self-sealing vacuum detection system and a vacuumizing leakage detection method, and the system comprises a box body and a cover cap, the bottom of the cover cap is provided with a pressing plate which can move up and down, the top of the cover cap is fixedly provided with a sealing ring, the cover cap is provided with an avoidance hole, the avoidance hole is internally provided with a flexible deformation part, the lower end of the flexible deformation part is connected to the pressing plate, and the upper end of the flexible deformation part is connected with the sealing ring. The method comprises the following steps: 1, mounting a to-be-detected module at an opening of a box body; 2, covering a cover cap to enable the circumferential edge of the pressing plate to be in contact with the module to be detected; 3, vacuumizing the box body and the cover cap by using a vacuum pump, extending the flexible deformation part under the action of pressure difference, and driving the pressing plate to downwards extrude the to-be-detected module, so that the to-be-detected module and the box body are sealed; 4, filling helium into the cover to a preset value; and 5, measuring whether helium permeates into the box body or not by using a leak detector. The beneficial effects are that the to-be-detected module can be rapidly and automatically sealed in the vacuum sealing cavity, and sealing performance detection is completed.

Description

technical field [0001] The invention belongs to the technical field of sealing performance detection of vacuum sealing components, and in particular relates to a self-sealing vacuum detection system and a vacuum pumping leak detection method. Background technique [0002] In the field of optics, many physical devices are used in a vacuum environment, and the installation of these physical devices in a vacuum environment often requires sealed assembly of some components. For the sealing installation of these components, traditional technical means require manual intervention, that is, to apply pre-tightening force to the components to be sealed by means of screw connection. This method has the disadvantages of low efficiency, easy dust generation, and limited operating space. There is also a risk of uneven screw preload causing the component to crack. For example: the optical-mechanical module in the laser device, before the optical-mechanical module is installed online, it ...

AI Technical Summary

Problems solved by technology

For the sealing installation of these components, traditional technical means require manual intervention, that is, to apply pre-tightening force to the components to be sealed by means of screw connection. This method has the disadvantages of low efficiency, easy dust generation, and limited operating space. There is also a risk of component cracking due to uneven screw preload

For example: the optical-mechanical module in the laser device, before the optical-mechanical module is installed online, it needs to be connected and sealed with the off-line vacuum leak detection platform, and then the vacuum sealing performance test is carried out. Since the optical components in the optical-mechanical module are thin and fragile, The surface cleanliness is high, and the sealing efficiency and success rate of the connection with the vacuum leak detection platform are high, so the traditional screw connection method for sealing cannot meet the use requirements. Therefore, it is urgent to find a convenient and fast sealing method

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