Scanning electron microscope sample navigation method

A scanning electron microscope and navigation method technology, which is applied in the field of scanning electron microscope sample navigation, can solve the problems that electron microscopes are difficult to realize sample navigation, and achieve the effects of low equipment hardware and software requirements, high navigation accuracy, and good universality

Active Publication Date: 2021-04-09
CHENGDU ADVANCED METAL MATERIALS IND TECH RES INST CO LTD
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Problems solved by technology

[0003] The technical problem to be solved by the present invention is to provide a scanning electron microscope sample navigation m

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  • Scanning electron microscope sample navigation method
  • Scanning electron microscope sample navigation method
  • Scanning electron microscope sample navigation method

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Embodiment Construction

[0019] In order to solve the problem that it is difficult for old electron microscopes without navigation devices to realize sample navigation, the present invention discloses a scanning electron microscope sample navigation method. First, mark four vertices of a rectangle on the sample stage, and record four marks in the electron microscope Point the coordinate information of the sample stage when the point is in the center of the field of view, and then paste the sample. When pasting the sample, it is necessary to expose the four marking points, and image the sample stage after the sample is pasted directly above the sample stage, and then read the four marking points and The coordinate information of the sample placed in the imaging photo, the coordinate information of the sample position in the scanning electron microscope is calculated by using the change of the coordinate system in mathematics, and finally the sample position information is input in the control panel of th...

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Abstract

The invention relates to the field of electron microscope characterization, discloses a scanning electron microscope sample navigation method, and aims to solve the problem that an electron microscope without a navigation device can hardly realize sample navigation. The method comprises the following steps of: marking the four vertexes of a rectangle on a sample table, recording coordinate information of the sample table in an electron microscope when the four vertexes are in the center of a field of view, pasting a sample, exposing the four marking points when the sample is pasted, imaging the sample table after the sample is pasted right above the sample table, reading the coordinate information of the four marking points and the sample in the imaging picture, calculating the coordinate information of the sample position in the scanning electron microscope by utilizing the mathematical coordinate system change, and finally inputting the sample position information into a control panel of the sample table to realize sample navigation. The method is suitable for electron microscope sample navigation.

Description

technical field [0001] The invention relates to the field of electron microscope (referred to as electron microscope) characterization, in particular to a scanning electron microscope sample navigation method. Background technique [0002] The sample chamber of the electron microscope is in a vacuum state, and the placement position of the sample cannot be directly observed during the experiment, and the minimum magnification of the electron optical system has reached the magnification effect of 20 times, and the secondary electron image distortion is serious at low magnification. The sample position navigation function of this electron microscope is particularly important. The common scanning electron microscope sample navigation function is mostly configured by the manufacturer. Some manufacturers record the specific position coordinates of the standard sample stage, place the sample at the specific position during use, and drive the sample stage motor through the supporti...

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Application Information

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IPC IPC(8): G01N23/2204G01N23/2251
CPCG01N23/2204G01N23/2251
Inventor 邢远唐敏杨旭蔡晓文
Owner CHENGDU ADVANCED METAL MATERIALS IND TECH RES INST CO LTD
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