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Controllable micro-lens array cleaning device

A technology of microlens array and cleaning device, which is applied in the directions of cleaning flexible articles, cleaning methods and utensils, cleaning methods using gas flow, etc.

Pending Publication Date: 2021-04-30
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the controllable microlens array with a large area array has extremely strict requirements on the environment, and dust, impurities, etc. will affect the final processing effect
Moreover, the microlens array is exposed upwards and outwards during processing, and impurities are easy to adhere to

Method used

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  • Controllable micro-lens array cleaning device
  • Controllable micro-lens array cleaning device
  • Controllable micro-lens array cleaning device

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Embodiment Construction

[0038] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is only some embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0039] The invention provides a controllable microlens array cleaning device, such as Figure 1-2 shown, including:

[0040] The annular fixing part 19 is arranged around the controllable microlens array 11; in some embodiments, the annular fixing part 19 is a fixed frame for fixing the controllable microlens array 11, and can also be used f...

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Abstract

The invention provides a controllable micro-lens array cleaning device. The controllable micro-lens array cleaning device comprises an annular fixing part arranged around a controllable micro-lens array, a gas spraying module and a gas exhaust module. The gas spraying module is connected with the inner side wall of the annular fixing part, and the gas spraying module is arranged above the controllable micro-lens array. The gas exhaust module is connected with the inner side wall of the annular fixing part, the gas exhaust module is arranged above the controllable micro-lens array, and the gas exhaust module is arranged on the side opposite to the gas spraying module. According to the technical scheme, the surface of the controllable micro-lens array can be cleaned in time, and cleanness of the controllable micro-lens array is kept.

Description

technical field [0001] The invention relates to the technical field of laser annealing, in particular to a controllable microlens array cleaning device. Background technique [0002] The laser annealing equipment with a large area array controllable microlens array can solve the problem of uneven spot size and quality during the laser annealing process, thereby ensuring the processing uniformity during the wafer annealing process. However, the controllable microlens array with a large area array has extremely strict environmental requirements, and dust, impurities, etc. will affect the final processing effect. Moreover, the microlens array is exposed upwards and outwards during processing, and impurities are easy to adhere to. Since the laser annealing device requires extremely high precision, the attached impurities will have a serious impact, so it is necessary to solve the cleaning problem of the large-area controllable microlens array. Contents of the invention [00...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B08B5/02B08B11/00
CPCB08B5/02B08B11/00
Inventor 侯煜王瑜岳嵩王然张紫辰
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI